Method for metal and silicon nitride ceramic high-temperature co-fired composite substrate: Fid-Bau Portal

Method for metal and silicon nitride ceramic high-temperature co-fired composite substrate

YU LIXUE / ZOU WENGE / LI PINGQI / WANG MEILING

The invention discloses a method for a metal and silicon nitride ceramic high-temperature co-fired composite substrate. The metal and silicon nitride ceramic high-temperature co-fired composite substrate comprises multilayer ceramic, a silicon nitride ceramic green film and tungsten-molybdenum slurry, the process comprises a high-temperature sintering process, a multilayer ceramic production process, a silk-screen printing process, a laminating process, a slicing process and a production process, and an adopted device comprises a rubber discharging furnace and an atmosphere air pressure sintering furnace. The silicon nitride ceramic green film production process comprises the following steps: mixing the following materials in percentage by weight: 4-7% of yttrium oxide, 4-8% of a binder, 5-8% of a plasticizer and a leveling agent and the balance of silicon nitride ceramic powder to form a green body film, and putting the green body film into a nitrogen atmosphere, and discharging glueto prepare the silicon nitride ceramic green film; the method for the metal and silicon nitride ceramic high-temperature co-fired composite substrate has the advantages that the metal and the siliconnitride ceramic with high thermal conductivity are co-fired at high temperature, and the bending strength is good.

本发明公开了一种金属和氮化硅陶瓷高温共烧复合基板的方法，包括多层陶瓷、氮化硅陶瓷生坯膜和钨钼浆料，工艺包括高温烧结工艺、多层陶瓷生产工艺、丝网印刷工艺、叠压工艺、切片工艺和生产工艺，器件包括：排胶炉和气氛气压烧结炉，氮化硅陶瓷生坯膜生产工艺包括：氮化硅陶瓷粉、助烧剂氧化钇、粘结剂、流平剂和增塑剂，重量比为氧化钇占总重量的4%～7%、粘结剂占总重量的4%～8%、增塑剂和流平剂占总重量的5%～8%，其余为氮化硅陶瓷粉体，将上述材料混合成生胚膜放入氮气气氛中排胶，制得氮化硅陶瓷生坯膜；本发明一种金属和氮化硅陶瓷高温共烧复合基板的方法具有高温共烧出高热导的金属和氮化硅陶瓷、抗弯强度好的优点。

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