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Preparation method of co-fired aluminum nitride ceramic substrate
The invention relates to the field of electronic ceramic substrates, provides a method for co-firing an aluminum nitride ceramic substrate, and solves the defects of low heat conductivity and high energy consumption caused by over-high sintering temperature of co-fired aluminum nitride ceramic in the prior art. Comprising the following preparation steps: (1) batching and ball-milling: feeding aluminum nitride powder and a sintering aid into a ball mill for ball-milling treatment; (2) defoaming: aging the ball-milled slurry for 2-3 hours, and defoaming the slurry in a defoaming machine until the viscosity of the slurry reaches 20000-23000 mPa.s; (3) tape casting: feeding the slurry treated in the step (2) into a tape casting machine for tape casting, and standing for 6-8 hours; (4) punching; (5) laminating: decompressing the printed green sheet according to the thickness requirement; (6) glue discharging is conducted, specifically, the green body pieces treated in the step (5) are placed in a nitrogen protection glue discharging furnace, and glue discharging is conducted under the nitrogen atmosphere till the carbon content is 2000 ppm or below; and (7) sintering.
本发明涉及电子陶瓷基板领域，提供一种共烧氮化铝陶瓷基板的方法，解决现有技术的共烧氮化铝陶瓷热导率不高、烧结温度过高导致能耗大的缺陷。包括以下制备步骤：(1)配料球磨：将氮化铝粉体、烧结助剂送入球磨机中球磨处理；(2)脱泡：将球磨好的浆料陈腐2－3h后送入脱泡机进行脱泡至浆料粘度达到20000～23000mPa·s；(3)流延成型：将步骤(2)处理后的浆料送入流延机进行流延成型，并静置6－8h；(4)冲片；(5)叠压：根据厚度需求对经过印刷后的生坯片进行解压；(6)排胶：将经过步骤(5)处理后的生坯片放入氮气保护排胶炉中，在氮气气氛下进行排胶至碳含量到2000ppm以下；(7)烧结。
Preparation method of co-fired aluminum nitride ceramic substrate
The invention relates to the field of electronic ceramic substrates, provides a method for co-firing an aluminum nitride ceramic substrate, and solves the defects of low heat conductivity and high energy consumption caused by over-high sintering temperature of co-fired aluminum nitride ceramic in the prior art. Comprising the following preparation steps: (1) batching and ball-milling: feeding aluminum nitride powder and a sintering aid into a ball mill for ball-milling treatment; (2) defoaming: aging the ball-milled slurry for 2-3 hours, and defoaming the slurry in a defoaming machine until the viscosity of the slurry reaches 20000-23000 mPa.s; (3) tape casting: feeding the slurry treated in the step (2) into a tape casting machine for tape casting, and standing for 6-8 hours; (4) punching; (5) laminating: decompressing the printed green sheet according to the thickness requirement; (6) glue discharging is conducted, specifically, the green body pieces treated in the step (5) are placed in a nitrogen protection glue discharging furnace, and glue discharging is conducted under the nitrogen atmosphere till the carbon content is 2000 ppm or below; and (7) sintering.
本发明涉及电子陶瓷基板领域，提供一种共烧氮化铝陶瓷基板的方法，解决现有技术的共烧氮化铝陶瓷热导率不高、烧结温度过高导致能耗大的缺陷。包括以下制备步骤：(1)配料球磨：将氮化铝粉体、烧结助剂送入球磨机中球磨处理；(2)脱泡：将球磨好的浆料陈腐2－3h后送入脱泡机进行脱泡至浆料粘度达到20000～23000mPa·s；(3)流延成型：将步骤(2)处理后的浆料送入流延机进行流延成型，并静置6－8h；(4)冲片；(5)叠压：根据厚度需求对经过印刷后的生坯片进行解压；(6)排胶：将经过步骤(5)处理后的生坯片放入氮气保护排胶炉中，在氮气气氛下进行排胶至碳含量到2000ppm以下；(7)烧结。
Preparation method of co-fired aluminum nitride ceramic substrate
一种共烧氮化铝陶瓷基板的制备方法
YANG DASHENG (Autor:in) / SHI CHUNXI (Autor:in)
27.05.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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