Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Recycling method of tantalum carbide crucible material for PVT method
The invention discloses a recycling method of a tantalum carbide crucible material for a PVT method, and belongs to the technical field of recycling of tantalum carbide crucible materials. The technical problem to be solved by the invention is the recovery method of the tantalum carbide crucible material. The method comprises the steps of after the growth of an aluminum nitride crystal is finished, taking an invalid tantalum carbide crucible, cleaning an aluminum nitride raw material in the tantalum carbide crucible, crushing and ball-milling the tantalum carbide crucible, washing the tantalum carbide crucible with a mixed solution of hydrofluoric acid and nitric acid, carrying out ethanol ultrasonic cleaning and drying to obtain tantalum carbide powder, adding a certain amount of carbon powder, carrying out a carbonization reaction, calcining at the temperature of 800-850 DEG C in an air environment to obtain tantalum carbide micro-powder, putting the tantalum carbide micro-powder into the tantalum crucible, carrying out high-temperature calcination at the temperature of 2000-2100 DEG C to obtain 5N-grade tantalum carbide micro-powder, and carrying out cold isostatic pressing forming and calcining to obtain the formed tantalum crucible. According to the simple method, the invalid crucible material is utilized, the utilization rate of the crucible is increased, and the cost is greatly saved.
一种PVT法用碳化钽坩埚材料回收利用方法，它属于碳化钽坩埚材料回收技术领域。本发明要解决的技术问题为碳化钽坩埚材料的回收方法。本发明氮化铝晶体生长结束后，取失效的碳化钽坩埚，清理干净碳化钽坩埚内的氮化铝原料，将碳化钽坩埚破碎球磨后用氢氟酸和硝酸的混合溶液进行洗涤，然后经过乙醇超声清洗、烘干，得到碳化钽粉加入一定量的碳粉，进行碳化反应，然后在800‑850℃下，空气环境下煅烧，得到碳化钽微粉放入钽化钽坩埚中，并在2000‑2100℃下进行高温煅烧，得到5N级碳化钽微粉，经过冷等静压成型、煅烧，得到成型后的钽坩埚。本发明通过简易的方法，利用了失效坩埚材料，提高了坩埚的利用率，大幅节省了成本。
Recycling method of tantalum carbide crucible material for PVT method
The invention discloses a recycling method of a tantalum carbide crucible material for a PVT method, and belongs to the technical field of recycling of tantalum carbide crucible materials. The technical problem to be solved by the invention is the recovery method of the tantalum carbide crucible material. The method comprises the steps of after the growth of an aluminum nitride crystal is finished, taking an invalid tantalum carbide crucible, cleaning an aluminum nitride raw material in the tantalum carbide crucible, crushing and ball-milling the tantalum carbide crucible, washing the tantalum carbide crucible with a mixed solution of hydrofluoric acid and nitric acid, carrying out ethanol ultrasonic cleaning and drying to obtain tantalum carbide powder, adding a certain amount of carbon powder, carrying out a carbonization reaction, calcining at the temperature of 800-850 DEG C in an air environment to obtain tantalum carbide micro-powder, putting the tantalum carbide micro-powder into the tantalum crucible, carrying out high-temperature calcination at the temperature of 2000-2100 DEG C to obtain 5N-grade tantalum carbide micro-powder, and carrying out cold isostatic pressing forming and calcining to obtain the formed tantalum crucible. According to the simple method, the invalid crucible material is utilized, the utilization rate of the crucible is increased, and the cost is greatly saved.
一种PVT法用碳化钽坩埚材料回收利用方法，它属于碳化钽坩埚材料回收技术领域。本发明要解决的技术问题为碳化钽坩埚材料的回收方法。本发明氮化铝晶体生长结束后，取失效的碳化钽坩埚，清理干净碳化钽坩埚内的氮化铝原料，将碳化钽坩埚破碎球磨后用氢氟酸和硝酸的混合溶液进行洗涤，然后经过乙醇超声清洗、烘干，得到碳化钽粉加入一定量的碳粉，进行碳化反应，然后在800‑850℃下，空气环境下煅烧，得到碳化钽微粉放入钽化钽坩埚中，并在2000‑2100℃下进行高温煅烧，得到5N级碳化钽微粉，经过冷等静压成型、煅烧，得到成型后的钽坩埚。本发明通过简易的方法，利用了失效坩埚材料，提高了坩埚的利用率，大幅节省了成本。
Recycling method of tantalum carbide crucible material for PVT method
一种PVT法用碳化钽坩埚材料回收利用方法
11.06.2021
Patent
Elektronische Ressource
Chinesisch
Tantalum carbide crucible and preparation method and application thereof
| Europäisches Patentamt | 2022
| Europäisches Patentamt | 2023