Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Tantalum carbide crucible and preparation method and application thereof
The invention provides a tantalum carbide crucible, which comprises a tantalum carbide crucible body, the tantalum carbide crucible body has uniform wall thickness, and the tantalum carbide crucible body comprises a cylindrical side wall with an opening at the upper end and a concave hollow hemispherical bottom wall; wherein the side wall and the bottom wall are integrally formed; and the tantalum carbide crucible cover is designed to be matched with the upper end opening in size and shape so as to close the upper end opening. The invention further provides a method for preparing the tantalum carbide crucible. The invention also provides application of the tantalum carbide crucible or the tantalum carbide crucible prepared by the method in crystal growth, especially in aluminum nitride crystal growth. According to the tantalum carbide crucible, the problem that a traditional integrated crucible is prone to cracking is solved, and many defects that raw materials are lost, the performance of graphite heat preservation accessories is degraded and stable control of a temperature field is affected due to a split type crucible are overcome.
本发明提供一种碳化钽坩埚，其包括：碳化钽坩埚本体，其中所述碳化钽坩埚本体具有均匀壁厚，以及所述碳化钽坩埚本体包括具有上端开口的圆筒状侧壁和呈下凹的空心半球状底壁；其中所述侧壁和所述底壁一体成型；碳化钽坩埚盖，其尺寸和形状被设计为匹配于所述上端开口，以将所述上端开口闭合。本发明还提供一种制备本发明的碳化钽坩埚的方法。本发明还提供本发明的碳化钽坩埚或者本发明的方法制得的碳化钽坩埚在晶体生长，特别是氮化铝晶体生长中的应用。本发明的碳化钽坩埚解决传统一体式坩埚易于开裂的问题和分体式坩埚带来损失原料、退化石墨保温辅件性能、影响温场稳定控制的诸多弊端。
Tantalum carbide crucible and preparation method and application thereof
The invention provides a tantalum carbide crucible, which comprises a tantalum carbide crucible body, the tantalum carbide crucible body has uniform wall thickness, and the tantalum carbide crucible body comprises a cylindrical side wall with an opening at the upper end and a concave hollow hemispherical bottom wall; wherein the side wall and the bottom wall are integrally formed; and the tantalum carbide crucible cover is designed to be matched with the upper end opening in size and shape so as to close the upper end opening. The invention further provides a method for preparing the tantalum carbide crucible. The invention also provides application of the tantalum carbide crucible or the tantalum carbide crucible prepared by the method in crystal growth, especially in aluminum nitride crystal growth. According to the tantalum carbide crucible, the problem that a traditional integrated crucible is prone to cracking is solved, and many defects that raw materials are lost, the performance of graphite heat preservation accessories is degraded and stable control of a temperature field is affected due to a split type crucible are overcome.
本发明提供一种碳化钽坩埚，其包括：碳化钽坩埚本体，其中所述碳化钽坩埚本体具有均匀壁厚，以及所述碳化钽坩埚本体包括具有上端开口的圆筒状侧壁和呈下凹的空心半球状底壁；其中所述侧壁和所述底壁一体成型；碳化钽坩埚盖，其尺寸和形状被设计为匹配于所述上端开口，以将所述上端开口闭合。本发明还提供一种制备本发明的碳化钽坩埚的方法。本发明还提供本发明的碳化钽坩埚或者本发明的方法制得的碳化钽坩埚在晶体生长，特别是氮化铝晶体生长中的应用。本发明的碳化钽坩埚解决传统一体式坩埚易于开裂的问题和分体式坩埚带来损失原料、退化石墨保温辅件性能、影响温场稳定控制的诸多弊端。
Tantalum carbide crucible and preparation method and application thereof
碳化钽坩埚及其制备方法和应用
GUO LIWEI (Autor:in) / HU WEIJIE (Autor:in) / WANG WENJUN (Autor:in) / CHEN XIAOLONG (Autor:in)
28.06.2022
Patent
Elektronische Ressource
Chinesisch
| Europäisches Patentamt | 2023
Recycling method of tantalum carbide crucible material for PVT method
Europäisches Patentamt | 2021
Tantalum carbide feed, tantalum carbide product and preparation method thereof
| Europäisches Patentamt | 2024
| Europäisches Patentamt | 2023
Tantalum carbide coating as well as preparation method and application thereof
| Europäisches Patentamt | 2024