Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Method for preparing IGZO target material by recovering IGZO waste biscuit
The invention discloses a method for preparing an IGZO target material by recovering an IGZO waste biscuit, which comprises the following steps: firstly, knocking the IGZO waste biscuit into a block body, and then conducting crushing and crushing; performing heat treatment on the crushed powder to obtain heat-treated powder; then ball-milling and mixing the heat-treated powder with a dispersing agent, a binding agent, water and a defoaming agent to prepare IGZO slurry; then using the slurry to prepare IGZO powder through spray drying; and finally, conducting forming and sintering to prepare the IGZO target material. According to the method, the IGZO waste biscuit can be directly recycled to prepare the IGZO target material with the density larger than 6.31 g/cm<3>, the utilization rate of the IGZO powder and the yield of the IGZO target material in industrial production of the IGZO target material are improved, the recycling process is simple, operation is easy, cost is low, and the economic value is far higher than that of an IGZO waste biscuit recycling treatment method in the prior art.
本发明公开了一种IGZO废素坯回收制备IGZO靶材的方法，包括如下步骤：首先，将IGZO废素坯敲成块状体，然后破碎，粉碎；然后将粉碎粉末进行热处理，得到热处理粉末；然后将热处理粉末与分散剂、粘结剂、水和消泡剂球磨混合，制成IGZO浆料；然后通过喷雾干燥将浆料制成IGZO粉末；最后，通过成型和烧结制成IGZO靶材。本发明的方法可将IGZO废素坯直接回收利用，制成密度大于6.31g/cm3的IGZO靶材，提高了IGZO靶材工业生产中IGZO粉末的利用率和IGZO靶材的产率，回收工艺简单，容易操作，成本低，经济价值远高于现有技术对IGZO废素坯的回收处理方法。
Method for preparing IGZO target material by recovering IGZO waste biscuit
The invention discloses a method for preparing an IGZO target material by recovering an IGZO waste biscuit, which comprises the following steps: firstly, knocking the IGZO waste biscuit into a block body, and then conducting crushing and crushing; performing heat treatment on the crushed powder to obtain heat-treated powder; then ball-milling and mixing the heat-treated powder with a dispersing agent, a binding agent, water and a defoaming agent to prepare IGZO slurry; then using the slurry to prepare IGZO powder through spray drying; and finally, conducting forming and sintering to prepare the IGZO target material. According to the method, the IGZO waste biscuit can be directly recycled to prepare the IGZO target material with the density larger than 6.31 g/cm<3>, the utilization rate of the IGZO powder and the yield of the IGZO target material in industrial production of the IGZO target material are improved, the recycling process is simple, operation is easy, cost is low, and the economic value is far higher than that of an IGZO waste biscuit recycling treatment method in the prior art.
本发明公开了一种IGZO废素坯回收制备IGZO靶材的方法，包括如下步骤：首先，将IGZO废素坯敲成块状体，然后破碎，粉碎；然后将粉碎粉末进行热处理，得到热处理粉末；然后将热处理粉末与分散剂、粘结剂、水和消泡剂球磨混合，制成IGZO浆料；然后通过喷雾干燥将浆料制成IGZO粉末；最后，通过成型和烧结制成IGZO靶材。本发明的方法可将IGZO废素坯直接回收利用，制成密度大于6.31g/cm3的IGZO靶材，提高了IGZO靶材工业生产中IGZO粉末的利用率和IGZO靶材的产率，回收工艺简单，容易操作，成本低，经济价值远高于现有技术对IGZO废素坯的回收处理方法。
Method for preparing IGZO target material by recovering IGZO waste biscuit
一种IGZO废素坯回收制备IGZO靶材的方法
SI ZHENHUA (Autor:in) / SHAO XUELIANG (Autor:in) / LI KAIJIE (Autor:in) / ZHU LIU (Autor:in)
10.08.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
IGZO powder, target material and preparation method of IGZO powder
| Europäisches Patentamt | 2021