Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
IGZO powder, target material and preparation method of IGZO powder
The invention discloses a preparation method of IGZO powder, and belongs to the field of industrial material preparation. In the preparation method of the IGZO powder, the specific auxiliary agent with dispersing and adhesion functions is directly mixed with the oxide raw material, and then the mixture is subjected to ultrasonic treatment and then ground, so that the adhesion effect and the particle uniformity of the final product are guaranteed; meanwhile, the uniformity of the slurry is improved through ultrasonic vibration treatment, and the agglomeration phenomenon caused by failure of a dispersing agent due to long grinding time in a traditional solid phase method is avoided, or the problem that stability is reduced due to long-time mechanical friction of the surface of powder particles is solved. According to the method, few types of auxiliaries are used, few impurity elements are introduced, and the defects of the product can be reduced. The invention also discloses the IGZO powder prepared by the method, and the material is high in stability and uniformity. The invention further discloses an IGZO target material prepared from the IGZO powder and a preparation method of the IGZO target material, wherein the obtained IGZO target material is high in density and purity and few in defect and can be used for preparing industrial high-performance IGZO thin films.
本发明公开了一种IGZO粉体的制备方法，属于工业材料制备领域。本发明所述IGZO粉体制备方法中，选用特定具有分散及粘连功能的助剂与氧化物原料直接混合后，先经超声处理再研磨，既保障了粘结效果及最终产品的颗粒均一性；同时利用超声振动处理提高浆料的均匀性，避免了传统固相法中较长的研磨时间引起分散剂失效造成的团聚现象，或者粉体颗粒表面由于长时间的机械摩擦而引发稳定性降低等问题。该方法所用助剂种类少，引入杂质元素少，可降低产品的缺陷。本发明还公开了所述方法制备的IGZO粉体，该材料稳定性及均匀性高。本发明还公开了一种由所述IGZO粉体制备的IGZO靶材及其制备方法，所得IGZO靶材密度及纯度高，缺陷少，可用于工业高性能IGZO薄膜的制备中。
IGZO powder, target material and preparation method of IGZO powder
The invention discloses a preparation method of IGZO powder, and belongs to the field of industrial material preparation. In the preparation method of the IGZO powder, the specific auxiliary agent with dispersing and adhesion functions is directly mixed with the oxide raw material, and then the mixture is subjected to ultrasonic treatment and then ground, so that the adhesion effect and the particle uniformity of the final product are guaranteed; meanwhile, the uniformity of the slurry is improved through ultrasonic vibration treatment, and the agglomeration phenomenon caused by failure of a dispersing agent due to long grinding time in a traditional solid phase method is avoided, or the problem that stability is reduced due to long-time mechanical friction of the surface of powder particles is solved. According to the method, few types of auxiliaries are used, few impurity elements are introduced, and the defects of the product can be reduced. The invention also discloses the IGZO powder prepared by the method, and the material is high in stability and uniformity. The invention further discloses an IGZO target material prepared from the IGZO powder and a preparation method of the IGZO target material, wherein the obtained IGZO target material is high in density and purity and few in defect and can be used for preparing industrial high-performance IGZO thin films.
本发明公开了一种IGZO粉体的制备方法，属于工业材料制备领域。本发明所述IGZO粉体制备方法中，选用特定具有分散及粘连功能的助剂与氧化物原料直接混合后，先经超声处理再研磨，既保障了粘结效果及最终产品的颗粒均一性；同时利用超声振动处理提高浆料的均匀性，避免了传统固相法中较长的研磨时间引起分散剂失效造成的团聚现象，或者粉体颗粒表面由于长时间的机械摩擦而引发稳定性降低等问题。该方法所用助剂种类少，引入杂质元素少，可降低产品的缺陷。本发明还公开了所述方法制备的IGZO粉体，该材料稳定性及均匀性高。本发明还公开了一种由所述IGZO粉体制备的IGZO靶材及其制备方法，所得IGZO靶材密度及纯度高，缺陷少，可用于工业高性能IGZO薄膜的制备中。
IGZO powder, target material and preparation method of IGZO powder
一种IGZO粉体、靶材及其制备方法
LI KAIJIE (Autor:in) / SHAO XUELIANG (Autor:in) / ZHANG LAIWEN (Autor:in) / ZHU LIU (Autor:in)
11.06.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME