Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Furnace charging method for IGZO rotating target during sintering
The invention discloses a furnace charging method for an IGZO rotating target during sintering. The furnace charging method is characterized in that a corundum mullite bracket is additionally arranged at the bottom of the IGZO rotating target, the position of a silicon-molybdenum rod is changed, and a specially-made zinc oxide gasket and treated corundum particles are used, so that an opening of the IGZO rotating target is uniformly shrunk, the rotating target is quickly and completely sintered, the target density is achieved, and the quality of the IGZO rotating target is improved; and the yield is ensured, the time is saved, and the energy consumption is reduced.
本发明公开了一种IGZO旋转靶烧结时的装炉方法，通过在IGZO旋转靶的底部加装刚玉莫来石支架、改变硅钼棒位置、使用特制的氧化锌垫圈和处理过的刚玉粒，可使IGZO旋转靶口均匀收缩，旋转靶快速完全烧结，达到目标密度，提高了IGZO旋转靶的品质，保证了成品率，同时节约了时间，降低了能耗。
Furnace charging method for IGZO rotating target during sintering
The invention discloses a furnace charging method for an IGZO rotating target during sintering. The furnace charging method is characterized in that a corundum mullite bracket is additionally arranged at the bottom of the IGZO rotating target, the position of a silicon-molybdenum rod is changed, and a specially-made zinc oxide gasket and treated corundum particles are used, so that an opening of the IGZO rotating target is uniformly shrunk, the rotating target is quickly and completely sintered, the target density is achieved, and the quality of the IGZO rotating target is improved; and the yield is ensured, the time is saved, and the energy consumption is reduced.
本发明公开了一种IGZO旋转靶烧结时的装炉方法，通过在IGZO旋转靶的底部加装刚玉莫来石支架、改变硅钼棒位置、使用特制的氧化锌垫圈和处理过的刚玉粒，可使IGZO旋转靶口均匀收缩，旋转靶快速完全烧结，达到目标密度，提高了IGZO旋转靶的品质，保证了成品率，同时节约了时间，降低了能耗。
Furnace charging method for IGZO rotating target during sintering
一种IGZO旋转靶烧结时的装炉方法
LI QINGFENG (Autor:in) / LUO SHULI (Autor:in) / WANG JIANTANG (Autor:in) / LUO RUHE (Autor:in) / LUO SHENGHUA (Autor:in) / LUO SHENGLEI (Autor:in) / LUO LIJUN (Autor:in) / WANG ZHUANGWEI (Autor:in) / LUO SHENGKAI (Autor:in) / LUO SHENGXI (Autor:in)
24.08.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
,
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL