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Zinc telluride powder and preparation method of target material of zinc telluride powder
The invention provides a preparation method of zinc telluride powder, and the method comprises the following steps: respectively placing tellurium and zinc in a heating area of a vapor deposition device, and enabling the tellurium and the zinc not to be in contact; respectively heating tellurium and zinc, and carrying out gas-phase reaction on tellurium and zinc to obtain zinc telluride powder. The method specifically comprises the steps that tellurium is heated, the temperature is controlled to rise to 1000-1050 DEG C from the room temperature, and the temperature rise time is 70-100 min; meanwhile, the zinc is heated, and the temperature is controlled to be increased to 950-1000 DEG C from the room temperature, wherein the temperature increasing time is 70-100 min. The zinc telluride powder is directly prepared through the gas phase reaction, the zinc telluride powder has high purity and can be directly used for preparing the zinc telluride target material, the relative density of the obtained target material is larger than 98%, and free zinc and free tellurium are smaller than 200 ppm.
本发明提供了一种碲化锌粉末的制备方法,包括以下步骤:将碲和锌分别置于气相沉积装置的加热区,使碲和锌不接触;对碲和锌分别进行加热,使二者进行气相反应,得到碲化锌粉末;具体的:对碲进行加热,控制温度从室温升温至1000~1050℃,升温时间70~100min;同时对锌进行加热,控制温度从室温升温至950~1000℃,升温时间70~100min。本发明通过气相反应直接制备得到了碲化锌粉末,其具有较高的纯度,可直接用于碲化锌靶材制备,得到的靶材相对密度大于98%,游离锌和游离碲小于200ppm。
Zinc telluride powder and preparation method of target material of zinc telluride powder
The invention provides a preparation method of zinc telluride powder, and the method comprises the following steps: respectively placing tellurium and zinc in a heating area of a vapor deposition device, and enabling the tellurium and the zinc not to be in contact; respectively heating tellurium and zinc, and carrying out gas-phase reaction on tellurium and zinc to obtain zinc telluride powder. The method specifically comprises the steps that tellurium is heated, the temperature is controlled to rise to 1000-1050 DEG C from the room temperature, and the temperature rise time is 70-100 min; meanwhile, the zinc is heated, and the temperature is controlled to be increased to 950-1000 DEG C from the room temperature, wherein the temperature increasing time is 70-100 min. The zinc telluride powder is directly prepared through the gas phase reaction, the zinc telluride powder has high purity and can be directly used for preparing the zinc telluride target material, the relative density of the obtained target material is larger than 98%, and free zinc and free tellurium are smaller than 200 ppm.
本发明提供了一种碲化锌粉末的制备方法,包括以下步骤:将碲和锌分别置于气相沉积装置的加热区,使碲和锌不接触;对碲和锌分别进行加热,使二者进行气相反应,得到碲化锌粉末;具体的:对碲进行加热,控制温度从室温升温至1000~1050℃,升温时间70~100min;同时对锌进行加热,控制温度从室温升温至950~1000℃,升温时间70~100min。本发明通过气相反应直接制备得到了碲化锌粉末,其具有较高的纯度,可直接用于碲化锌靶材制备,得到的靶材相对密度大于98%,游离锌和游离碲小于200ppm。
Zinc telluride powder and preparation method of target material of zinc telluride powder
一种碲化锌粉末及其靶材的制备方法
WEN CHONGBIN (Autor:in) / WANG YINGJIE (Autor:in) / ZHU LIU (Autor:in) / TONG PEIYUN (Autor:in)
21.09.2021
Patent
Elektronische Ressource
Chinesisch
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