Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Zinc telluride zinc-doped plane target material and preparation method thereof
The invention provides a preparation method of a zinc telluride zinc-doped plane target material. The method comprises the following steps: S1) mixing: mixing zinc telluride powder, zinc elementary substance powder and tellurium elementary substance powder to obtain a mixed material; S2) sintering: heating and sintering the mixed material to obtain a sintered material; S3) ball milling: carrying out ball milling on the sintered material to obtain a ball-milled material; s4) pre-pressing: pre-pressing the ball-milled material to obtain a molded green body; and S5) hot pressing: carrying out vacuum hot pressing sintering on the molded blank to obtain the zinc telluride zinc-doped plane target material. Compared with the prior art, zinc and tellurium are doped in zinc telluride, so that the conductivity of the original zinc telluride target material can be improved, the purity and the density of the prepared target material are relatively high, the sputtering conductivity of the target material can be improved, and the preparation method is simple in process, relatively low in equipment requirement, relatively low in cost and capable of realizing batch production.
本发明提供了一种碲化锌掺锌平面靶材的制备方法，包括：S1)混料：将碲化锌粉体、锌单质粉体与碲单质粉体混合，得到混合物料；S2)烧结：将所述混合物料加热烧结，得到烧结物料；S3)球磨：将所述烧结物料进行球磨，得到球磨物料；S4)预压：将所述球磨物料进行预压，得到成型坯体；S5)热压：将所述成型坯体进行真空热压烧结，得到碲化锌掺锌平面靶材。与现有技术相比，本发明在碲化锌中掺锌以及掺碲可以使原本的碲化锌靶材的导电性得到改善，使制得的靶材纯度和密度均较高且可以提高靶材溅射的电导率，并且该制备方法工艺简单，对设备要求较低，成本较低，可批量生产。
Zinc telluride zinc-doped plane target material and preparation method thereof
The invention provides a preparation method of a zinc telluride zinc-doped plane target material. The method comprises the following steps: S1) mixing: mixing zinc telluride powder, zinc elementary substance powder and tellurium elementary substance powder to obtain a mixed material; S2) sintering: heating and sintering the mixed material to obtain a sintered material; S3) ball milling: carrying out ball milling on the sintered material to obtain a ball-milled material; s4) pre-pressing: pre-pressing the ball-milled material to obtain a molded green body; and S5) hot pressing: carrying out vacuum hot pressing sintering on the molded blank to obtain the zinc telluride zinc-doped plane target material. Compared with the prior art, zinc and tellurium are doped in zinc telluride, so that the conductivity of the original zinc telluride target material can be improved, the purity and the density of the prepared target material are relatively high, the sputtering conductivity of the target material can be improved, and the preparation method is simple in process, relatively low in equipment requirement, relatively low in cost and capable of realizing batch production.
本发明提供了一种碲化锌掺锌平面靶材的制备方法，包括：S1)混料：将碲化锌粉体、锌单质粉体与碲单质粉体混合，得到混合物料；S2)烧结：将所述混合物料加热烧结，得到烧结物料；S3)球磨：将所述烧结物料进行球磨，得到球磨物料；S4)预压：将所述球磨物料进行预压，得到成型坯体；S5)热压：将所述成型坯体进行真空热压烧结，得到碲化锌掺锌平面靶材。与现有技术相比，本发明在碲化锌中掺锌以及掺碲可以使原本的碲化锌靶材的导电性得到改善，使制得的靶材纯度和密度均较高且可以提高靶材溅射的电导率，并且该制备方法工艺简单，对设备要求较低，成本较低，可批量生产。
Zinc telluride zinc-doped plane target material and preparation method thereof
一种碲化锌掺锌平面靶材及其制备方法
ZHOU RONGYAN (Autor:in) / WU CAIHONG (Autor:in) / WEN CHONGBIN (Autor:in) / TONG PEIYUN (Autor:in) / ZHU LIU (Autor:in)
17.09.2021
Patent
Elektronische Ressource
Chinesisch
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