Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Zinc telluride rotating target material and preparation method thereof
The invention belongs to the technical field of target materials, and discloses a preparation method of a zinc telluride rotating target material, which comprises the following steps: step 1, uniformly mixing Te powder, Zn powder and ZnTe powder to obtain a mixture; 2, the mixture is subjected to primary firing at the temperature of 380-420 DEG C for 10-20 min to obtain a primary firing product; step 3, carrying out ball milling on the first-firing product, and homogenizing to obtain a homogenized material; and 4, loading the homogenized material into a two-way pressing graphite rotating target mold, carrying out hot pressing sintering, cooling and discharging to obtain the high-density zinc-doped zinc telluride rotating target material. The method has two control key points: 1, primary sintering is required before grinding, so that the powder bonding uniformity is improved, and excessive resistivity caused by non-uniform material distribution in the bidirectional hot pressing process is avoided; 2, hot pressing adopts bidirectional hot pressing, so that the pressure can be obviously reduced, and the relative density is relatively high; meanwhile, the invention also provides the zinc telluride rotating target material.
本发明属于靶材技术领域，公开了一种碲化锌旋转靶材的制备方法，包括如下步骤：步骤1：Te粉末、Zn粉末和ZnTe粉末混合均匀，得到混合料；步骤2：将混合料进行一烧得到一烧产物，一烧温度为380‑420℃，一烧时间10‑20min；步骤3：将一烧产物球磨、均质得到均质料；步骤4：均质料装入双向压石墨旋转靶模具，进行热压烧结，降温出炉，即得高密度掺锌碲化锌旋转靶材。该方法有2个控制要点：1.研磨前要一烧，提高粉末结合均匀性，避免在双向热压过程中物质分布不均匀导致的电阻率过大；2.热压要采用双向热压，其压力可明显降低，且相对密度较高。同时，本发明还提供了该碲化锌旋转靶材。
Zinc telluride rotating target material and preparation method thereof
The invention belongs to the technical field of target materials, and discloses a preparation method of a zinc telluride rotating target material, which comprises the following steps: step 1, uniformly mixing Te powder, Zn powder and ZnTe powder to obtain a mixture; 2, the mixture is subjected to primary firing at the temperature of 380-420 DEG C for 10-20 min to obtain a primary firing product; step 3, carrying out ball milling on the first-firing product, and homogenizing to obtain a homogenized material; and 4, loading the homogenized material into a two-way pressing graphite rotating target mold, carrying out hot pressing sintering, cooling and discharging to obtain the high-density zinc-doped zinc telluride rotating target material. The method has two control key points: 1, primary sintering is required before grinding, so that the powder bonding uniformity is improved, and excessive resistivity caused by non-uniform material distribution in the bidirectional hot pressing process is avoided; 2, hot pressing adopts bidirectional hot pressing, so that the pressure can be obviously reduced, and the relative density is relatively high; meanwhile, the invention also provides the zinc telluride rotating target material.
本发明属于靶材技术领域，公开了一种碲化锌旋转靶材的制备方法，包括如下步骤：步骤1：Te粉末、Zn粉末和ZnTe粉末混合均匀，得到混合料；步骤2：将混合料进行一烧得到一烧产物，一烧温度为380‑420℃，一烧时间10‑20min；步骤3：将一烧产物球磨、均质得到均质料；步骤4：均质料装入双向压石墨旋转靶模具，进行热压烧结，降温出炉，即得高密度掺锌碲化锌旋转靶材。该方法有2个控制要点：1.研磨前要一烧，提高粉末结合均匀性，避免在双向热压过程中物质分布不均匀导致的电阻率过大；2.热压要采用双向热压，其压力可明显降低，且相对密度较高。同时，本发明还提供了该碲化锌旋转靶材。
Zinc telluride rotating target material and preparation method thereof
一种碲化锌旋转靶材及其制备方法
LUO HAIQI (Autor:in) / WEN CHONGBIN (Autor:in) / ZHI RUIJUN (Autor:in) / HU ZHIXIANG (Autor:in)
29.03.2024
Patent
Elektronische Ressource
Chinesisch
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