Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Rotary furnace carbon-ceramic furnace tube for CVD carbon vapor deposition, rotary furnace and preparation method of carbon-ceramic furnace tube
The invention discloses a rotary furnace carbon-ceramic furnace tube for CVD carbon vapor deposition, a rotary furnace and a preparation method of the carbon-ceramic furnace tube. The preparation method of the carbon ceramic furnace tube comprises: alternately overlaying multiple layers of carbon fiber non-woven cloth and carbon fiber net tires and compounding in a needling mode to form a tubular structure, and after the tubular structure is subjected to thermocuring treatment and chemical vapor deposition, obtaining a furnace tube blank; machining the blank, and obtaining a finish machining furnace tube blank; and carrying out melt siliconizing treatment and silicon carbide treatment on the finish-machined furnace tube blank to obtain the carbon-ceramic furnace tube. The carbon ceramic furnace tube has the advantages of low density, wear resistance, high strength, oxidation resistance, no heat fading and the like, particularly does not react with hydrogen and hydrocarbon organic gas to generate hydrogen embrittlement corrosion rupture, can prevent metal impurities from being introduced in the processing process of a silicon-based negative electrode material, and can be widely applied to CVD carbon vapor deposition, coating and a high-temperature furnace tube in various processes such as ammonia decomposition hydrogen.
本发明公开了一种用于CVD碳气相沉积的回转炉碳陶炉管、回转炉及碳陶炉管的制备方法。碳陶炉管的制备方法为：以多层碳纤维无纬布和碳纤维网胎交替叠加，针刺复合形成管状结构，管状结构经过热固化处理及化学气相沉积后，得到炉管坯体；将坯体进行机加工，得到精加工炉管坯体；将精加工炉管坯体进行熔融渗硅处理和碳化硅化处理，即得碳陶炉管。该碳陶炉管具有密度低、耐磨损、强度高、抗氧化、无热衰退等优点，特别是不会与氢气及碳氢有机气体发生反应而产生氢脆腐蚀破裂，能够避免硅基负极材料加工过程中引入金属杂质，可广泛应用于CVD碳气相沉积、包覆，氨分解氢等各种工艺的高温炉管。
Rotary furnace carbon-ceramic furnace tube for CVD carbon vapor deposition, rotary furnace and preparation method of carbon-ceramic furnace tube
The invention discloses a rotary furnace carbon-ceramic furnace tube for CVD carbon vapor deposition, a rotary furnace and a preparation method of the carbon-ceramic furnace tube. The preparation method of the carbon ceramic furnace tube comprises: alternately overlaying multiple layers of carbon fiber non-woven cloth and carbon fiber net tires and compounding in a needling mode to form a tubular structure, and after the tubular structure is subjected to thermocuring treatment and chemical vapor deposition, obtaining a furnace tube blank; machining the blank, and obtaining a finish machining furnace tube blank; and carrying out melt siliconizing treatment and silicon carbide treatment on the finish-machined furnace tube blank to obtain the carbon-ceramic furnace tube. The carbon ceramic furnace tube has the advantages of low density, wear resistance, high strength, oxidation resistance, no heat fading and the like, particularly does not react with hydrogen and hydrocarbon organic gas to generate hydrogen embrittlement corrosion rupture, can prevent metal impurities from being introduced in the processing process of a silicon-based negative electrode material, and can be widely applied to CVD carbon vapor deposition, coating and a high-temperature furnace tube in various processes such as ammonia decomposition hydrogen.
本发明公开了一种用于CVD碳气相沉积的回转炉碳陶炉管、回转炉及碳陶炉管的制备方法。碳陶炉管的制备方法为：以多层碳纤维无纬布和碳纤维网胎交替叠加，针刺复合形成管状结构，管状结构经过热固化处理及化学气相沉积后，得到炉管坯体；将坯体进行机加工，得到精加工炉管坯体；将精加工炉管坯体进行熔融渗硅处理和碳化硅化处理，即得碳陶炉管。该碳陶炉管具有密度低、耐磨损、强度高、抗氧化、无热衰退等优点，特别是不会与氢气及碳氢有机气体发生反应而产生氢脆腐蚀破裂，能够避免硅基负极材料加工过程中引入金属杂质，可广泛应用于CVD碳气相沉积、包覆，氨分解氢等各种工艺的高温炉管。
Rotary furnace carbon-ceramic furnace tube for CVD carbon vapor deposition, rotary furnace and preparation method of carbon-ceramic furnace tube
一种用于CVD碳气相沉积的回转炉碳陶炉管、回转炉及碳陶炉管的制备方法
YI XU (Autor:in) / LIAO JIQIAO (Autor:in)
21.09.2021
Patent
Elektronische Ressource
Chinesisch
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