Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Sintering method for long-size ITO rotating target cylinder
The invention provides a sintering method of a long-size ITO rotating target cylinder, wherein the sintering method comprises the steps: firstly, a target cylinder is placed through a square aluminum oxide setter plate with a through round hole in the middle, so that air flow can uniformly convect from the inner wall of a target material, and the temperature uniformity is good; two silicon carbide cylinders are stacked up and down to sleeve the target cylinder, four square holes are uniformly distributed in the middle of each silicon carbide cylinder, and the lower silicon carbide cylinder is placed on an aluminum oxide cushion block around the aluminum oxide setter plate, so that the temperature uniformity around the target cylinder is good in the atmosphere sintering process, in the sintering process, airflow can uniformly convect from the middle of the bottom of the silicon carbide cylinder, and oxygen direct blowing is avoided; and finally, sintering is carried out through a sintering curve, the sintering temperature rising time is prolonged, and the sintering temperature falling time is prolonged, so that the target cylinder shrinks uniformly, the ITO rotating target cylinder with the length of 750-1000 mm can be normally sintered, and the ITO rotating target cylinder is good in straightness, not prone to bending, free of cutting and capable of being directly machined.
本发明提供一种长尺寸的ITO旋转靶筒烧结方法，首先通过方形的中间带有贯通圆孔的氧化铝承烧板来放置靶筒，这样气流可以从靶材内壁均匀对流，温度均匀性好；再通过采用两个碳化硅筒上下叠放在一起套在靶筒外，碳化硅筒中部均匀分布四个方孔，下方碳化硅筒放在氧化铝承烧板周围的氧化铝垫块上，这样确保在气氛烧结的过程中，靶筒四周的温度均匀性好，烧结过程中，气流可以从碳化硅筒底部中间均匀对流，并且避免氧气直吹；最后通过烧结曲线烧结，烧结升温时间延长和降温时间延长，使靶筒收缩均匀，能够正常烧结长度750‑1000mm的ITO旋转靶筒，且直线度良好不易弯曲，不需要切割，可直接进行机加工。
Sintering method for long-size ITO rotating target cylinder
The invention provides a sintering method of a long-size ITO rotating target cylinder, wherein the sintering method comprises the steps: firstly, a target cylinder is placed through a square aluminum oxide setter plate with a through round hole in the middle, so that air flow can uniformly convect from the inner wall of a target material, and the temperature uniformity is good; two silicon carbide cylinders are stacked up and down to sleeve the target cylinder, four square holes are uniformly distributed in the middle of each silicon carbide cylinder, and the lower silicon carbide cylinder is placed on an aluminum oxide cushion block around the aluminum oxide setter plate, so that the temperature uniformity around the target cylinder is good in the atmosphere sintering process, in the sintering process, airflow can uniformly convect from the middle of the bottom of the silicon carbide cylinder, and oxygen direct blowing is avoided; and finally, sintering is carried out through a sintering curve, the sintering temperature rising time is prolonged, and the sintering temperature falling time is prolonged, so that the target cylinder shrinks uniformly, the ITO rotating target cylinder with the length of 750-1000 mm can be normally sintered, and the ITO rotating target cylinder is good in straightness, not prone to bending, free of cutting and capable of being directly machined.
本发明提供一种长尺寸的ITO旋转靶筒烧结方法，首先通过方形的中间带有贯通圆孔的氧化铝承烧板来放置靶筒，这样气流可以从靶材内壁均匀对流，温度均匀性好；再通过采用两个碳化硅筒上下叠放在一起套在靶筒外，碳化硅筒中部均匀分布四个方孔，下方碳化硅筒放在氧化铝承烧板周围的氧化铝垫块上，这样确保在气氛烧结的过程中，靶筒四周的温度均匀性好，烧结过程中，气流可以从碳化硅筒底部中间均匀对流，并且避免氧气直吹；最后通过烧结曲线烧结，烧结升温时间延长和降温时间延长，使靶筒收缩均匀，能够正常烧结长度750‑1000mm的ITO旋转靶筒，且直线度良好不易弯曲，不需要切割，可直接进行机加工。
Sintering method for long-size ITO rotating target cylinder
一种长尺寸的ITO旋转靶筒烧结方法
ZENG TAN (Autor:in) / WANG ZHIQIANG (Autor:in) / SHENG MINGLIANG (Autor:in) / ZENG DUNFENG (Autor:in) / MA JIANBAO (Autor:in) / SHI YU (Autor:in)
05.11.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
/
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
,
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
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