Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Hanging sintering type large-size rotating target sintering method
The invention discloses a hanging burning type large-size rotating target sintering method, which belongs to the technical field of target material processing, and comprises the following steps: step 1, preparing a large-size rotating target material blank, and enabling the outer diameter of the bottom of the blank to be greater than that of a rotating target material main body; secondly, the large-size rotating target material blank is pre-sintered till the density is 85 +/-2%; step 3, pre-processing the pre-sintered rotary target material, and processing an annular step at the bottom of the pre-sintered blank obtained in the step 2; and 4, the preprocessed rotating target material is placed on a hanging burning device and placed in a sintering furnace to be sintered, the temperature is naturally reduced to the room temperature, and sintering is finished. By means of the method, deformation of the lower bottom opening and the target material body is reduced, internal and external heat convection of the long rotating target is enhanced, uniform heating is guaranteed, and therefore uniform shrinkage of the whole rotating target body is guaranteed, a series of production cost of material using, machining, recycling, processing and the like caused by thickening sintering is reduced, the sintering yield is increased, and production efficiency is guaranteed.
本发明公开了一种吊烧式大尺寸旋转靶烧结方法，属于靶材加工技术领域，包括以下步骤：步骤一、制备大尺寸旋转靶材毛坯，毛坯底部的外径大于旋转靶材主体的外径；步骤二、将大尺寸旋转靶材毛坯进行预烧结，烧至致密度为85±2%；步骤三、对预烧结旋转靶材进行预加工，在步骤二得到的预烧结的毛坯底部加工圆环台阶；步骤四、将预加工的旋转靶材放置在吊烧装置上放进烧结炉进行烧结，自然降温至室温，烧结结束。本发明的方法降低了下底口及靶材主体的变形，加强了长旋转靶内外热对流，保证受热均匀，从而保证整个旋转靶主体的收缩均匀，降低了因加厚烧结所带来的用料、加工、回收、处理等一系列生产成本，提高了烧结良品率，保证生产效率。
Hanging sintering type large-size rotating target sintering method
The invention discloses a hanging burning type large-size rotating target sintering method, which belongs to the technical field of target material processing, and comprises the following steps: step 1, preparing a large-size rotating target material blank, and enabling the outer diameter of the bottom of the blank to be greater than that of a rotating target material main body; secondly, the large-size rotating target material blank is pre-sintered till the density is 85 +/-2%; step 3, pre-processing the pre-sintered rotary target material, and processing an annular step at the bottom of the pre-sintered blank obtained in the step 2; and 4, the preprocessed rotating target material is placed on a hanging burning device and placed in a sintering furnace to be sintered, the temperature is naturally reduced to the room temperature, and sintering is finished. By means of the method, deformation of the lower bottom opening and the target material body is reduced, internal and external heat convection of the long rotating target is enhanced, uniform heating is guaranteed, and therefore uniform shrinkage of the whole rotating target body is guaranteed, a series of production cost of material using, machining, recycling, processing and the like caused by thickening sintering is reduced, the sintering yield is increased, and production efficiency is guaranteed.
本发明公开了一种吊烧式大尺寸旋转靶烧结方法，属于靶材加工技术领域，包括以下步骤：步骤一、制备大尺寸旋转靶材毛坯，毛坯底部的外径大于旋转靶材主体的外径；步骤二、将大尺寸旋转靶材毛坯进行预烧结，烧至致密度为85±2%；步骤三、对预烧结旋转靶材进行预加工，在步骤二得到的预烧结的毛坯底部加工圆环台阶；步骤四、将预加工的旋转靶材放置在吊烧装置上放进烧结炉进行烧结，自然降温至室温，烧结结束。本发明的方法降低了下底口及靶材主体的变形，加强了长旋转靶内外热对流，保证受热均匀，从而保证整个旋转靶主体的收缩均匀，降低了因加厚烧结所带来的用料、加工、回收、处理等一系列生产成本，提高了烧结良品率，保证生产效率。
Hanging sintering type large-size rotating target sintering method
一种吊烧式大尺寸旋转靶烧结方法
LI QINGFENG (Autor:in) / LUO SHENGLEI (Autor:in) / TAMRITATE SATOSHI (Autor:in) / LUO SHENGHUA (Autor:in) / LUO LIJUN (Autor:in) / LUO SHENGFEI (Autor:in) / LUO SHENGJIN (Autor:in) / WANG ZHUANGWEI (Autor:in) / LUO SHENGKAI (Autor:in) / LUO SHENGXI (Autor:in)
14.11.2023
Patent
Elektronische Ressource
Chinesisch
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