Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of reaction sintering silicon carbide large boat support
The invention relates to a preparation method of a reaction sintering silicon carbide large boat support. The preparation method comprises the following steps: separately manufacturing biscuits, conducting drying, carrying out finish machining, conducting splicing with a tool, carrying out deformation control in the sintering process by constraining with a tool, carrying out rough spraying by using a white corundum 24-60-mesh material after sintering, detecting and marking a place with condensed silicon, and carrying out fine product treatment. According to the scheme, a quartz boat tray is replaced by a reactive sintering silicon carbide material, so that the service life of the boat support is greatly prolonged, and the shutdown replacement frequency is reduced. Compared with a quartz material, the silicon carbide material is high in strength, good in heat-conducting property and better in product diffusivity. After the biscuit is finely processed, mortise and tenon structure splicing and sintering are carried out, a graphite profiling tool is used for supporting and restraining, and finally the high-precision and high-performance boat support made of the reaction sintering silicon carbide material is produced with low cost. The large boat support is applied in batches in the market at present.
一种反应烧结碳化硅大舟托的制备方法，素坯分开制作，干燥后精加工，后进行拼接，拼接过程中需要使用工装，烧结过程的变形控制：使用工装进行约束，烧成后的使用白刚玉24‑60目的材料进行粗喷，检测并标记有冷凝硅的地方，精细精品处理。本方案采用反应烧结碳化硅材料代替石英舟托盘，大大的延长了舟托的使用寿命，减少了停机更换频次；碳化硅材质较石英材质的强度高、导热性能好，对产品扩散性更好。素坯精细加工后进行卯榫结构拼接再烧结，使用石墨仿形工装进行支撑和约束，最终达到低成本生产高精度、高性能的反应烧结碳化硅材料的舟托。目前已在市场上批量应用。
Preparation method of reaction sintering silicon carbide large boat support
The invention relates to a preparation method of a reaction sintering silicon carbide large boat support. The preparation method comprises the following steps: separately manufacturing biscuits, conducting drying, carrying out finish machining, conducting splicing with a tool, carrying out deformation control in the sintering process by constraining with a tool, carrying out rough spraying by using a white corundum 24-60-mesh material after sintering, detecting and marking a place with condensed silicon, and carrying out fine product treatment. According to the scheme, a quartz boat tray is replaced by a reactive sintering silicon carbide material, so that the service life of the boat support is greatly prolonged, and the shutdown replacement frequency is reduced. Compared with a quartz material, the silicon carbide material is high in strength, good in heat-conducting property and better in product diffusivity. After the biscuit is finely processed, mortise and tenon structure splicing and sintering are carried out, a graphite profiling tool is used for supporting and restraining, and finally the high-precision and high-performance boat support made of the reaction sintering silicon carbide material is produced with low cost. The large boat support is applied in batches in the market at present.
一种反应烧结碳化硅大舟托的制备方法，素坯分开制作，干燥后精加工，后进行拼接，拼接过程中需要使用工装，烧结过程的变形控制：使用工装进行约束，烧成后的使用白刚玉24‑60目的材料进行粗喷，检测并标记有冷凝硅的地方，精细精品处理。本方案采用反应烧结碳化硅材料代替石英舟托盘，大大的延长了舟托的使用寿命，减少了停机更换频次；碳化硅材质较石英材质的强度高、导热性能好，对产品扩散性更好。素坯精细加工后进行卯榫结构拼接再烧结，使用石墨仿形工装进行支撑和约束，最终达到低成本生产高精度、高性能的反应烧结碳化硅材料的舟托。目前已在市场上批量应用。
Preparation method of reaction sintering silicon carbide large boat support
一种反应烧结碳化硅大舟托的制备方法
WANG XINGLONG (Autor:in) / ZHAO JIN (Autor:in) / HUANGFU BINGCHEN (Autor:in) / YANG KAI (Autor:in) / WANG XINBO (Autor:in)
04.01.2022
Patent
Elektronische Ressource
Chinesisch
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