Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Integrated horizontal silicon carbide boat and preparation method thereof
The invention belongs to the technical field of precise ceramic parts for semiconductor equipment, and particularly relates to an integrated horizontal silicon carbide boat and a preparation method thereof. The preparation method comprises the following steps: mixing and ball-milling a grouting system mixture and silicon carbide powder with different granularities to obtain slurry, then pouring to obtain a silicon carbide boat biscuit, and finally carrying out the procedures of glue discharging, dipping, reactive sintering and the like to obtain a silicon carbide boat product. By adjusting the slurry composition and preparation process parameters, integrated preparation of the silicon carbide boat is realized, and the performance of the silicon carbide boat product is improved. According to the preparation method disclosed by the invention, during reactive sintering, a mode of coating Si3N4 is adopted to replace traditional BN permeation prevention, so that introduction of a B impurity is avoided. When the slurry is prepared, four stages of particles are proportioned, and the high-solid-content slurry is prepared by closely packing the particles. The preparation method disclosed by the invention is simple in process and short in preparation period, and introduction of impurities in a multi-process process is avoided.
本发明属于半导体装备用精密陶瓷部件技术领域，具体涉及一种一体式卧式碳化硅晶舟及其制备方法。本发明通过将注浆体系混合料和不同粒度的碳化硅粉体混合、球磨，得到浆料，然后浇注得到碳化硅晶舟素坯，最后再通过排胶、浸渍、反应烧结等工序，得到碳化硅晶舟产品。本发明通过对浆料组成以及制备工艺参数进行调整，以实现碳化硅晶舟的一体化制备，并对碳化硅晶舟产品的性能进行改善。本发明所述制备方法在反应烧结时，采用涂覆Si3N4的方式取代传统的BN阻渗，避免了B杂质的引入。本发明中的浆料在制备时采用四级颗粒配比，通过颗粒紧密堆积制备出高固含量的浆料。本发明的制备方法工序简单、制备周期短，避免了多工序过程中杂质的引入。
Integrated horizontal silicon carbide boat and preparation method thereof
The invention belongs to the technical field of precise ceramic parts for semiconductor equipment, and particularly relates to an integrated horizontal silicon carbide boat and a preparation method thereof. The preparation method comprises the following steps: mixing and ball-milling a grouting system mixture and silicon carbide powder with different granularities to obtain slurry, then pouring to obtain a silicon carbide boat biscuit, and finally carrying out the procedures of glue discharging, dipping, reactive sintering and the like to obtain a silicon carbide boat product. By adjusting the slurry composition and preparation process parameters, integrated preparation of the silicon carbide boat is realized, and the performance of the silicon carbide boat product is improved. According to the preparation method disclosed by the invention, during reactive sintering, a mode of coating Si3N4 is adopted to replace traditional BN permeation prevention, so that introduction of a B impurity is avoided. When the slurry is prepared, four stages of particles are proportioned, and the high-solid-content slurry is prepared by closely packing the particles. The preparation method disclosed by the invention is simple in process and short in preparation period, and introduction of impurities in a multi-process process is avoided.
本发明属于半导体装备用精密陶瓷部件技术领域，具体涉及一种一体式卧式碳化硅晶舟及其制备方法。本发明通过将注浆体系混合料和不同粒度的碳化硅粉体混合、球磨，得到浆料，然后浇注得到碳化硅晶舟素坯，最后再通过排胶、浸渍、反应烧结等工序，得到碳化硅晶舟产品。本发明通过对浆料组成以及制备工艺参数进行调整，以实现碳化硅晶舟的一体化制备，并对碳化硅晶舟产品的性能进行改善。本发明所述制备方法在反应烧结时，采用涂覆Si3N4的方式取代传统的BN阻渗，避免了B杂质的引入。本发明中的浆料在制备时采用四级颗粒配比，通过颗粒紧密堆积制备出高固含量的浆料。本发明的制备方法工序简单、制备周期短，避免了多工序过程中杂质的引入。
Integrated horizontal silicon carbide boat and preparation method thereof
一种一体式卧式碳化硅晶舟及其制备方法
FAN TIANYANG (Autor:in) / LI BINGWEN (Autor:in) / CHEN ENHOU (Autor:in) / ZHANG XIN (Autor:in) / SONG YUNYUN (Autor:in)
10.12.2024
Patent
Elektronische Ressource
Chinesisch
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