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Carbon/carbon composite material crucible, preparation method thereof and crystal growth furnace
The invention provides a carbon/carbon composite material crucible, a preparation method thereof and a crystal growth furnace. The crucible comprises a crucible body, the crucible body is provided with a cavity used for containing objects, the side wall of the crucible body comprises a surface layer and an inner layer, the surface layer wraps the outer portion of the inner layer, and the surface layer and the inner layer are both made of carbon/carbon composite materials. The thickness of the side wall of the crucible body is gradually increased in the axial direction of the crucible body from the bottom of the cavity to the opening of the cavity; the density of the inner layer is smaller than that of the surface layer, the thickness of the inner layer is gradually increased in the axial direction of the crucible body from the bottom of the cavity to the opening of the cavity, and the thickness of the surface layer is kept unchanged. The carbon/carbon composite material crucible has the axial temperature gradient design, the axial temperature gradient can be generated without the structural design of a heating device, the structure of the heating device can be simplified, and the carbon/carbon composite material crucible can be compatible with an induction heating crystal growth furnace and a resistance heating crystal growth furnace.
本发明提供了一种碳/碳复合材料坩埚及其制备方法、晶体生长炉,其中坩埚包括坩埚体;坩埚体具有用于置物的腔体,坩埚体的侧壁包括表层和里层,表层包裹于所述里层的外部,表层和所述里层的材质均为碳/碳复合材料;坩埚体的侧壁厚度沿坩埚体的轴向自腔体的底部至腔体的敞口处的方向上逐渐增大;里层的密度小于表层的密度,且里层的厚度沿坩埚体的轴向自腔体的底部至腔体的敞口处的方向上逐渐增大,而表层的厚度保持不变。该碳/碳复合材料坩埚自身具有轴向温度梯度设计,无需通过加热装置的结构设计来产生轴向温度梯度,可简化加热装置的结构,且可以兼容感应加热长晶炉和电阻加热长晶炉。
Carbon/carbon composite material crucible, preparation method thereof and crystal growth furnace
The invention provides a carbon/carbon composite material crucible, a preparation method thereof and a crystal growth furnace. The crucible comprises a crucible body, the crucible body is provided with a cavity used for containing objects, the side wall of the crucible body comprises a surface layer and an inner layer, the surface layer wraps the outer portion of the inner layer, and the surface layer and the inner layer are both made of carbon/carbon composite materials. The thickness of the side wall of the crucible body is gradually increased in the axial direction of the crucible body from the bottom of the cavity to the opening of the cavity; the density of the inner layer is smaller than that of the surface layer, the thickness of the inner layer is gradually increased in the axial direction of the crucible body from the bottom of the cavity to the opening of the cavity, and the thickness of the surface layer is kept unchanged. The carbon/carbon composite material crucible has the axial temperature gradient design, the axial temperature gradient can be generated without the structural design of a heating device, the structure of the heating device can be simplified, and the carbon/carbon composite material crucible can be compatible with an induction heating crystal growth furnace and a resistance heating crystal growth furnace.
本发明提供了一种碳/碳复合材料坩埚及其制备方法、晶体生长炉,其中坩埚包括坩埚体;坩埚体具有用于置物的腔体,坩埚体的侧壁包括表层和里层,表层包裹于所述里层的外部,表层和所述里层的材质均为碳/碳复合材料;坩埚体的侧壁厚度沿坩埚体的轴向自腔体的底部至腔体的敞口处的方向上逐渐增大;里层的密度小于表层的密度,且里层的厚度沿坩埚体的轴向自腔体的底部至腔体的敞口处的方向上逐渐增大,而表层的厚度保持不变。该碳/碳复合材料坩埚自身具有轴向温度梯度设计,无需通过加热装置的结构设计来产生轴向温度梯度,可简化加热装置的结构,且可以兼容感应加热长晶炉和电阻加热长晶炉。
Carbon/carbon composite material crucible, preparation method thereof and crystal growth furnace
碳/碳复合材料坩埚及其制备方法、晶体生长炉
LIAO JIQIAO (Autor:in) / LI BINGJU (Autor:in) / LI YAOPING (Autor:in) / PENG HAOBO (Autor:in) / LI JUN (Autor:in)
29.04.2022
Patent
Elektronische Ressource
Chinesisch
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