Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Rotary ceramic target material for efficient solar cell
The invention discloses a rotary ceramic target material for a high-efficiency solar cell. The ceramic target material comprises the following components in percentage by weight: 97-98% of indium oxide, 0.5-2% of tin oxide and 1-2.5% of doped oxide, the doped oxide is 3-5 of titanium oxide, tungsten oxide, molybdenum oxide, zirconium oxide, cerium oxide and silicon oxide. Multi-element doping is adopted, a specific sintering temperature system is matched, high target material density can be effectively achieved, and the problem that knots are generated on the surface of the target material in the continuous sputtering process is solved. The light transmittance of the thin film in the infrared band can be effectively improved, and then the photoelectric conversion capacity of the solar cell in the infrared band is improved.
本发明公开了一种高效太阳能电池用旋转陶瓷靶材，所述陶瓷靶材的组份为97‑98wt%的氧化铟以及0.5‑2wt%的氧化锡和1‑2.5wt%的掺杂氧化物；所述掺杂氧化物为氧化钛、氧化钨、氧化钼、氧化锆、氧化铈、氧化硅中的3‑5种。本发明采用多元素的掺杂并配合特定的烧结温度制度，可有效实现较高的靶材密度，改善连续溅射过程中靶材表面产生节瘤的问题。本发明可有效提高薄膜在红外波段的透光率，进而提高太阳能电池红外波段的光电转换能力。
Rotary ceramic target material for efficient solar cell
The invention discloses a rotary ceramic target material for a high-efficiency solar cell. The ceramic target material comprises the following components in percentage by weight: 97-98% of indium oxide, 0.5-2% of tin oxide and 1-2.5% of doped oxide, the doped oxide is 3-5 of titanium oxide, tungsten oxide, molybdenum oxide, zirconium oxide, cerium oxide and silicon oxide. Multi-element doping is adopted, a specific sintering temperature system is matched, high target material density can be effectively achieved, and the problem that knots are generated on the surface of the target material in the continuous sputtering process is solved. The light transmittance of the thin film in the infrared band can be effectively improved, and then the photoelectric conversion capacity of the solar cell in the infrared band is improved.
本发明公开了一种高效太阳能电池用旋转陶瓷靶材，所述陶瓷靶材的组份为97‑98wt%的氧化铟以及0.5‑2wt%的氧化锡和1‑2.5wt%的掺杂氧化物；所述掺杂氧化物为氧化钛、氧化钨、氧化钼、氧化锆、氧化铈、氧化硅中的3‑5种。本发明采用多元素的掺杂并配合特定的烧结温度制度，可有效实现较高的靶材密度，改善连续溅射过程中靶材表面产生节瘤的问题。本发明可有效提高薄膜在红外波段的透光率，进而提高太阳能电池红外波段的光电转换能力。
Rotary ceramic target material for efficient solar cell
一种高效太阳能电池用旋转陶瓷靶材
MA CHAONING (Autor:in) / XU JIWEN (Autor:in) / HUANG SHICHENG (Autor:in) / MENG HONGBO (Autor:in) / YAO YUAN (Autor:in) / HOU YUANXIN (Autor:in)
14.06.2022
Patent
Elektronische Ressource
Chinesisch
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