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Tungsten metallization-multilayer alumina black porcelain substrate and preparation method thereof
The invention discloses a tungsten metallization-multilayer aluminum oxide black porcelain substrate and a preparation method thereof, the main process of the preparation method comprises the following steps: providing a laminated body, and printing tungsten slurry on the front and back surfaces of a green porcelain tape on the top layer of the laminated body; cutting the laminated body to obtain a green body; the green body is subjected to high-temperature co-firing, specifically, after reaction equipment is vacuumized, mixed gas of nitrogen and wet hydrogen is introduced, the temperature is increased to 500-600 DEG C at the speed of 1-3 DEG C/min, and heat preservation is conducted for 1-3 h; the temperature is increased to 900-1000 DEG C at the speed of 1-3 DEG C/min, and heat preservation is conducted for 20 And finally, the temperature is increased to 1500-1650 DEG C at the speed of 1-2 DEG C/min, heat preservation is conducted for 1-3 h, and natural cooling along with Through the process improvement in the invention, the warping problem of the prepared tungsten metallization-multilayer aluminum oxide black porcelain substrate is obviously improved, and the black porcelain substrate has high flatness.
本发明公开了一种钨金属化‑多层氧化铝黑瓷基片及其制备方法,该制备方法主要工艺有:提供层叠体,所述层叠体顶层的生瓷带的正反两面均印刷有钨浆;生切所述层叠体,获得生坯;将所述生坯高温共烧,其中,高温共烧的工艺具体为反应设备中抽真空后,通入氮气和湿氢的混合气体,以1‑3℃/min升至500‑600℃,保温1‑3h;再以1‑3℃/min升至900‑1000℃,保温20‑60min;最后以1‑2℃/min升温至1500‑1650℃,保温1‑3h,随炉自然冷却。通过本发明中的工艺改进,使得制得的钨金属化‑多层氧化铝黑瓷基片的翘曲问题得到明显改善,黑瓷基片具有高平整度。
Tungsten metallization-multilayer alumina black porcelain substrate and preparation method thereof
The invention discloses a tungsten metallization-multilayer aluminum oxide black porcelain substrate and a preparation method thereof, the main process of the preparation method comprises the following steps: providing a laminated body, and printing tungsten slurry on the front and back surfaces of a green porcelain tape on the top layer of the laminated body; cutting the laminated body to obtain a green body; the green body is subjected to high-temperature co-firing, specifically, after reaction equipment is vacuumized, mixed gas of nitrogen and wet hydrogen is introduced, the temperature is increased to 500-600 DEG C at the speed of 1-3 DEG C/min, and heat preservation is conducted for 1-3 h; the temperature is increased to 900-1000 DEG C at the speed of 1-3 DEG C/min, and heat preservation is conducted for 20 And finally, the temperature is increased to 1500-1650 DEG C at the speed of 1-2 DEG C/min, heat preservation is conducted for 1-3 h, and natural cooling along with Through the process improvement in the invention, the warping problem of the prepared tungsten metallization-multilayer aluminum oxide black porcelain substrate is obviously improved, and the black porcelain substrate has high flatness.
本发明公开了一种钨金属化‑多层氧化铝黑瓷基片及其制备方法,该制备方法主要工艺有:提供层叠体,所述层叠体顶层的生瓷带的正反两面均印刷有钨浆;生切所述层叠体,获得生坯;将所述生坯高温共烧,其中,高温共烧的工艺具体为反应设备中抽真空后,通入氮气和湿氢的混合气体,以1‑3℃/min升至500‑600℃,保温1‑3h;再以1‑3℃/min升至900‑1000℃,保温20‑60min;最后以1‑2℃/min升温至1500‑1650℃,保温1‑3h,随炉自然冷却。通过本发明中的工艺改进,使得制得的钨金属化‑多层氧化铝黑瓷基片的翘曲问题得到明显改善,黑瓷基片具有高平整度。
Tungsten metallization-multilayer alumina black porcelain substrate and preparation method thereof
钨金属化-多层氧化铝黑瓷基片及其制备方法
ZHENG LIANG (Autor:in) / ZHANG DI (Autor:in) / LIU NIANQIANG (Autor:in) / LI TIANCI (Autor:in) / WU GANG (Autor:in) / QIN ZHIHAN (Autor:in) / MA TAO (Autor:in) / DING XIAOCONG (Autor:in)
12.07.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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