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Preparation method of SiBN/SiBCN composite interface layer on surface of ceramic fiber
The invention belongs to a preparation technology of a ceramic matrix composite material interface layer, and relates to a preparation method of a ceramic fiber surface SiBN/SiBCN composite interface layer. The SiBN/SiBCN composite interface layer is prepared on the surface of the fiber by taking silicon nitride fiber, silicon carbide fiber or alumina fiber and the like as an interface layer deposition substrate and organic polymer polyborosilicate nitrogen as a precursor and adopting a chemical vapor deposition process. According to the method, generation of corrosive gas HCl can be avoided, so that structural defects and strength damage of the fiber in the high-temperature deposition process are reduced, meanwhile, preparation of three or four component interface layers can be met by adopting a single precursor, the permeability in the fiber is improved, and the deposition uniformity of the interface layers is enhanced.
本发明属于陶瓷基复合材料界面层的制备技术,涉及一种陶瓷纤维表面SiBN/SiBCN复合界面层的制备方法。本发明以氮化硅纤维、碳化硅纤维或氧化铝纤维等作为界面层沉积基底,有机聚合物聚硼硅氮作为前驱体,采用化学气相沉积工艺,在纤维表面制备SiBN/SiBCN复合界面层。本发明可以避免腐蚀性气体HCl的产生,从而减少高温沉积过程中纤维的结构缺陷和强度损伤,同时采用单一前驱体即可满足三种或四种组元界面层的制备,增加在纤维内部的渗透性,增强界面层的沉积均匀性。
Preparation method of SiBN/SiBCN composite interface layer on surface of ceramic fiber
The invention belongs to a preparation technology of a ceramic matrix composite material interface layer, and relates to a preparation method of a ceramic fiber surface SiBN/SiBCN composite interface layer. The SiBN/SiBCN composite interface layer is prepared on the surface of the fiber by taking silicon nitride fiber, silicon carbide fiber or alumina fiber and the like as an interface layer deposition substrate and organic polymer polyborosilicate nitrogen as a precursor and adopting a chemical vapor deposition process. According to the method, generation of corrosive gas HCl can be avoided, so that structural defects and strength damage of the fiber in the high-temperature deposition process are reduced, meanwhile, preparation of three or four component interface layers can be met by adopting a single precursor, the permeability in the fiber is improved, and the deposition uniformity of the interface layers is enhanced.
本发明属于陶瓷基复合材料界面层的制备技术,涉及一种陶瓷纤维表面SiBN/SiBCN复合界面层的制备方法。本发明以氮化硅纤维、碳化硅纤维或氧化铝纤维等作为界面层沉积基底,有机聚合物聚硼硅氮作为前驱体,采用化学气相沉积工艺,在纤维表面制备SiBN/SiBCN复合界面层。本发明可以避免腐蚀性气体HCl的产生,从而减少高温沉积过程中纤维的结构缺陷和强度损伤,同时采用单一前驱体即可满足三种或四种组元界面层的制备,增加在纤维内部的渗透性,增强界面层的沉积均匀性。
Preparation method of SiBN/SiBCN composite interface layer on surface of ceramic fiber
一种陶瓷纤维表面SiBN/SiBCN复合界面层的制备方法
LYU XIAOXU (Autor:in) / JIAO JIAN (Autor:in) / SUN JIAJIA (Autor:in) / YANG JINHUA (Autor:in) / QI ZHE (Autor:in)
30.08.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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