Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The invention relates to the field of semiconductor processing equipment, in particular to a carbon-carbon composite material guide cylinder blank differential pressure impregnation densification device, which comprises an impregnation cylinder fixed on a base, an opening at the upper end of the impregnation cylinder, a cover plate fixedly connected to the opening through a bolt, and a pressure gauge arranged on the cover plate, and further comprises a feeding mechanism with an automatic pressure maintaining function, the feeding mechanism is used for conveying impregnation liquid into the impregnation cylinder; the base is provided with a bubble removing mechanism for removing bubbles from the impregnation liquid, and the bubble removing mechanism is provided with a stirring assembly; the feeding mechanism drives the bubble removing mechanism to remove bubbles from the impregnation liquid while conveying the impregnation liquid into the impregnation cylinder, and the bubble removing mechanism drives the stirring assembly to stir the impregnation liquid at the same time, so that the bubbles in the impregnation liquid are removed more thoroughly. According to the differential pressure impregnation densification device for the carbon-carbon composite material guide cylinder green body, impregnation liquid is automatically supplemented, the pressure of the guide cylinder green body is kept, repeated manual adjustment is not needed, and the working efficiency and the product quality are improved.
本发明涉及半导体加工设备领域，具体为一种碳‑碳复合材料导流筒坯体压差浸渍增密装置，包括固定在底座上的浸渍筒，浸渍筒上端开口且该开口处可通过螺栓固定连接盖板，盖板上设置有压力表，还包括：带有自动保压功能的送料机构，送料机构用来向浸渍筒内部输送浸渍液；所述底座上设置有用来对浸渍液除去气泡的去泡机构，去泡机构上设置有搅拌组件；所述送料机构在向浸渍筒内输送浸渍液的同时驱动去泡机构对浸渍液去除气泡，去泡机构同时驱动搅拌组件对浸渍液搅拌，以便更加彻底的去除浸渍液中的气泡。该种碳‑碳复合材料导流筒坯体压差浸渍增密装置，实现自动补充浸渍液并保持导流筒坯体压力，无需人工多次调节，提高工作效率和产品品质。
The invention relates to the field of semiconductor processing equipment, in particular to a carbon-carbon composite material guide cylinder blank differential pressure impregnation densification device, which comprises an impregnation cylinder fixed on a base, an opening at the upper end of the impregnation cylinder, a cover plate fixedly connected to the opening through a bolt, and a pressure gauge arranged on the cover plate, and further comprises a feeding mechanism with an automatic pressure maintaining function, the feeding mechanism is used for conveying impregnation liquid into the impregnation cylinder; the base is provided with a bubble removing mechanism for removing bubbles from the impregnation liquid, and the bubble removing mechanism is provided with a stirring assembly; the feeding mechanism drives the bubble removing mechanism to remove bubbles from the impregnation liquid while conveying the impregnation liquid into the impregnation cylinder, and the bubble removing mechanism drives the stirring assembly to stir the impregnation liquid at the same time, so that the bubbles in the impregnation liquid are removed more thoroughly. According to the differential pressure impregnation densification device for the carbon-carbon composite material guide cylinder green body, impregnation liquid is automatically supplemented, the pressure of the guide cylinder green body is kept, repeated manual adjustment is not needed, and the working efficiency and the product quality are improved.
本发明涉及半导体加工设备领域，具体为一种碳‑碳复合材料导流筒坯体压差浸渍增密装置，包括固定在底座上的浸渍筒，浸渍筒上端开口且该开口处可通过螺栓固定连接盖板，盖板上设置有压力表，还包括：带有自动保压功能的送料机构，送料机构用来向浸渍筒内部输送浸渍液；所述底座上设置有用来对浸渍液除去气泡的去泡机构，去泡机构上设置有搅拌组件；所述送料机构在向浸渍筒内输送浸渍液的同时驱动去泡机构对浸渍液去除气泡，去泡机构同时驱动搅拌组件对浸渍液搅拌，以便更加彻底的去除浸渍液中的气泡。该种碳‑碳复合材料导流筒坯体压差浸渍增密装置，实现自动补充浸渍液并保持导流筒坯体压力，无需人工多次调节，提高工作效率和产品品质。
Differential pressure impregnation densification device for carbon-carbon composite material guide cylinder blank
一种碳-碳复合材料导流筒坯体压差浸渍增密装置
25.10.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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