Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The invention discloses a laminated sintering process method of a high-performance silicon nitride ceramic substrate. The preparation method comprises the following steps: cutting a silicon nitride tape-casting blank sheet prepared by tape casting into a proper size, proportionally preparing deionized water, a dispersing agent and boron nitride powder into suspension slurry, spraying the suspension slurry on the surface of the cut tape-casting blank sheet, and then drying the sprayed tape-casting blank sheet; laminating and placing the tape-casting blank sheet coated with the powder in a boron nitride ceramic sagger, pressing a boron nitride ceramic block with holes on the silicon nitride laminated blank sheet, and carrying out glue discharging treatment on the silicon nitride laminated blank sheet placed in the boron nitride sagger; and continuously pressing a tungsten carbide ceramic block on the silicon nitride laminated blank sheet which is placed in the boron nitride sagger after glue removal, pressing the tungsten carbide ceramic block on the boron nitride ceramic block, and sintering the silicon nitride laminated blank sheet in a sintering furnace. The method can be used for producing the large-area silicon nitride ceramic substrate material with higher heat conductivity, excellent mechanical property and lower production cost.
本发明公开了一种高性能氮化硅陶瓷基板的叠层烧结工艺方法。将流延成型制得的氮化硅流延坯片裁剪成适当尺寸，将去离子水、分散剂、氮化硼粉末按比例配置成悬浮液浆料，对裁剪后的流延坯片表面喷涂悬浮液浆料，然后对喷涂后的流延坯片进行干燥；将完成覆粉后的流延坯片叠层摆放至氮化硼陶瓷匣钵之中，并在氮化硅叠层坯片上压放一块打有孔洞的氮化硼陶瓷块，对放置在氮化硼匣钵的氮化硅叠层坯片进行排胶处理；在排胶后的置于氮化硼匣钵内的氮化硅叠层坯片上继续压放一块碳化钨陶瓷块，碳化钨陶瓷块压在氮化硼陶瓷块上，在烧结炉中对氮化硅叠层坯片进行烧结。本发明可生产具有较高热导率、优异力学性能且生产成本较低的大面积氮化硅陶瓷基板材料。
The invention discloses a laminated sintering process method of a high-performance silicon nitride ceramic substrate. The preparation method comprises the following steps: cutting a silicon nitride tape-casting blank sheet prepared by tape casting into a proper size, proportionally preparing deionized water, a dispersing agent and boron nitride powder into suspension slurry, spraying the suspension slurry on the surface of the cut tape-casting blank sheet, and then drying the sprayed tape-casting blank sheet; laminating and placing the tape-casting blank sheet coated with the powder in a boron nitride ceramic sagger, pressing a boron nitride ceramic block with holes on the silicon nitride laminated blank sheet, and carrying out glue discharging treatment on the silicon nitride laminated blank sheet placed in the boron nitride sagger; and continuously pressing a tungsten carbide ceramic block on the silicon nitride laminated blank sheet which is placed in the boron nitride sagger after glue removal, pressing the tungsten carbide ceramic block on the boron nitride ceramic block, and sintering the silicon nitride laminated blank sheet in a sintering furnace. The method can be used for producing the large-area silicon nitride ceramic substrate material with higher heat conductivity, excellent mechanical property and lower production cost.
本发明公开了一种高性能氮化硅陶瓷基板的叠层烧结工艺方法。将流延成型制得的氮化硅流延坯片裁剪成适当尺寸，将去离子水、分散剂、氮化硼粉末按比例配置成悬浮液浆料，对裁剪后的流延坯片表面喷涂悬浮液浆料，然后对喷涂后的流延坯片进行干燥；将完成覆粉后的流延坯片叠层摆放至氮化硼陶瓷匣钵之中，并在氮化硅叠层坯片上压放一块打有孔洞的氮化硼陶瓷块，对放置在氮化硼匣钵的氮化硅叠层坯片进行排胶处理；在排胶后的置于氮化硼匣钵内的氮化硅叠层坯片上继续压放一块碳化钨陶瓷块，碳化钨陶瓷块压在氮化硼陶瓷块上，在烧结炉中对氮化硅叠层坯片进行烧结。本发明可生产具有较高热导率、优异力学性能且生产成本较低的大面积氮化硅陶瓷基板材料。
Laminated sintering process method of high-performance silicon nitride ceramic substrate
一种高性能氮化硅陶瓷基板的叠层烧结工艺方法
26.05.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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