Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Lanthanide rare earth doped indium zinc oxide sputtering target material and preparation method thereof
The invention discloses a lanthanide rare earth doped indium zinc oxide sputtering target material and a preparation method thereof. The preparation method comprises the following steps: respectively preparing an indium nitrate solution, a zinc salt solution and a lanthanide rare earth salt solution; mixing the indium nitrate solution, the zinc salt solution and the lanthanide rare earth salt solution to obtain a mixed solution; dropwise adding a precipitant into the mixed solution to carry out precipitation reaction, adjusting the pH value of the mixed solution to 5-11, filling the mixed solution into a high-pressure kettle, and carrying out hydrothermal reaction at 100-300 DEG C for 18-36 hours to obtain a precursor solution; washing and drying the precursor solution to obtain precursor powder, and calcining the precursor powder at 400-800 DEG C for 5-18 hours to obtain lanthanide rare earth doped indium zinc oxide powder; the preparation method comprises the following steps: mixing lanthanide rare earth doped indium zinc oxide powder and an acetic acid solution, grinding to form lanthanide rare earth doped indium zinc oxide slurry, pouring the slurry into a semi-sealed mold, sintering at 300-600MPa and 300-500 DEG C to obtain a lanthanide rare earth doped indium zinc oxide ceramic sample, and annealing in a protective atmosphere to obtain the lanthanide rare earth doped indium zinc oxide sputtering target material.
本发明公开了一种镧系稀土掺杂氧化铟锌溅射靶材及其制备方法，其包括：分别制备硝酸铟溶液、锌盐溶液、镧系稀土盐溶液；混合硝酸铟溶液、锌盐溶液、镧系稀土盐溶液，得到混合液；向混合液中滴加沉淀剂进行沉淀反应，调节混合液的pH值至5～11，将混合液装入高压釜中，在100～300℃下进行水热反应18～36h，得到前驱体溶液；前驱体溶液洗涤、干燥得到前驱体粉末，在400～800℃下煅烧5～18h，得到镧系稀土掺杂氧化铟锌粉末；镧系稀土掺杂氧化铟锌粉末和乙酸溶液混合，研磨形成镧系稀土掺杂氧化铟锌浆料倒入半密封模具中，在300～600MPa，300～500℃下进行烧结，得到镧系稀土掺杂氧化铟锌陶瓷样品，在保护气氛下进行退火处理，得到镧系稀土掺杂氧化铟锌溅射靶材。
Lanthanide rare earth doped indium zinc oxide sputtering target material and preparation method thereof
The invention discloses a lanthanide rare earth doped indium zinc oxide sputtering target material and a preparation method thereof. The preparation method comprises the following steps: respectively preparing an indium nitrate solution, a zinc salt solution and a lanthanide rare earth salt solution; mixing the indium nitrate solution, the zinc salt solution and the lanthanide rare earth salt solution to obtain a mixed solution; dropwise adding a precipitant into the mixed solution to carry out precipitation reaction, adjusting the pH value of the mixed solution to 5-11, filling the mixed solution into a high-pressure kettle, and carrying out hydrothermal reaction at 100-300 DEG C for 18-36 hours to obtain a precursor solution; washing and drying the precursor solution to obtain precursor powder, and calcining the precursor powder at 400-800 DEG C for 5-18 hours to obtain lanthanide rare earth doped indium zinc oxide powder; the preparation method comprises the following steps: mixing lanthanide rare earth doped indium zinc oxide powder and an acetic acid solution, grinding to form lanthanide rare earth doped indium zinc oxide slurry, pouring the slurry into a semi-sealed mold, sintering at 300-600MPa and 300-500 DEG C to obtain a lanthanide rare earth doped indium zinc oxide ceramic sample, and annealing in a protective atmosphere to obtain the lanthanide rare earth doped indium zinc oxide sputtering target material.
本发明公开了一种镧系稀土掺杂氧化铟锌溅射靶材及其制备方法，其包括：分别制备硝酸铟溶液、锌盐溶液、镧系稀土盐溶液；混合硝酸铟溶液、锌盐溶液、镧系稀土盐溶液，得到混合液；向混合液中滴加沉淀剂进行沉淀反应，调节混合液的pH值至5～11，将混合液装入高压釜中，在100～300℃下进行水热反应18～36h，得到前驱体溶液；前驱体溶液洗涤、干燥得到前驱体粉末，在400～800℃下煅烧5～18h，得到镧系稀土掺杂氧化铟锌粉末；镧系稀土掺杂氧化铟锌粉末和乙酸溶液混合，研磨形成镧系稀土掺杂氧化铟锌浆料倒入半密封模具中，在300～600MPa，300～500℃下进行烧结，得到镧系稀土掺杂氧化铟锌陶瓷样品，在保护气氛下进行退火处理，得到镧系稀土掺杂氧化铟锌溅射靶材。
Lanthanide rare earth doped indium zinc oxide sputtering target material and preparation method thereof
镧系稀土掺杂氧化铟锌溅射靶材及其制备方法
WANG ZHIJUN (Autor:in) / WU BIN (Autor:in) / SUN BENSHUANG (Autor:in) / WANG CHENGDUO (Autor:in) / CHEN JIE (Autor:in) / LIU YANG (Autor:in) / LIU MIAO (Autor:in) / ZENG XUEYUN (Autor:in)
15.09.2023
Patent
Elektronische Ressource
Chinesisch
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