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Preparation method of composite aluminum nitride ceramic substrate
The invention discloses a preparation method of a composite aluminum nitride ceramic substrate. The preparation method comprises the following steps: subjecting raw materials for preparing the composite aluminum nitride ceramic substrate to a raw material ball milling step, a defoaming step, a tape casting step, a punching step, a laminating step, a glue discharging step and a sintering step to obtain a finished product of the composite aluminum nitride ceramic substrate, the raw material ball-milling step comprises the following steps: feeding aluminum nitride powder, heat-conducting powder, a sintering aid, an organic solvent and a dispersing agent into a ball mill for ball-milling treatment; the defoaming step comprises the following steps: vacuumizing and defoaming the materials subjected to the ingredient ball milling step by adopting a vacuum defoaming machine to obtain ceramic slurry; the tape casting step comprises the following steps: feeding the ceramic slurry subjected to the defoaming step into a tape casting machine for tape casting, and standing for a certain time to obtain a green belt; the heat conductivity of the composite aluminum nitride ceramic substrate prepared by the preparation method of the composite aluminum nitride ceramic substrate is between that of aluminum oxide and that of aluminum nitride, and the cost of the composite aluminum nitride ceramic substrate is lower than that of an aluminum nitride ceramic substrate in the prior art.
本发明公开了一种复合氮化铝陶瓷基板的制备方法,包括:将制备复合氮化铝陶瓷基板的原料经过原料球磨步骤、脱泡步骤、流延成型步骤、冲片步骤、叠压步骤、排胶步骤及烧结步骤得到复合氮化铝陶瓷基板成品;原料球磨步骤包括:将氮化铝粉体、导热粉体、烧结助剂、有机溶剂、分散剂送入球磨机中球磨处理;脱泡步骤包括:采用真空脱泡机对经过所述配料球磨步骤后的物料进行抽真空脱泡,得到陶瓷浆料;流延成型步骤包括:将经过脱泡步骤的陶瓷浆料送入流延机进行流延成型,并静置一定时间,得到生坯带;该复合氮化铝陶瓷基板的制备方法制得的复合氮化铝陶瓷基板的导热率在介于氧化铝和氮化铝之间的基础上,成本比现有技术的氮化铝陶瓷基片更低。
Preparation method of composite aluminum nitride ceramic substrate
The invention discloses a preparation method of a composite aluminum nitride ceramic substrate. The preparation method comprises the following steps: subjecting raw materials for preparing the composite aluminum nitride ceramic substrate to a raw material ball milling step, a defoaming step, a tape casting step, a punching step, a laminating step, a glue discharging step and a sintering step to obtain a finished product of the composite aluminum nitride ceramic substrate, the raw material ball-milling step comprises the following steps: feeding aluminum nitride powder, heat-conducting powder, a sintering aid, an organic solvent and a dispersing agent into a ball mill for ball-milling treatment; the defoaming step comprises the following steps: vacuumizing and defoaming the materials subjected to the ingredient ball milling step by adopting a vacuum defoaming machine to obtain ceramic slurry; the tape casting step comprises the following steps: feeding the ceramic slurry subjected to the defoaming step into a tape casting machine for tape casting, and standing for a certain time to obtain a green belt; the heat conductivity of the composite aluminum nitride ceramic substrate prepared by the preparation method of the composite aluminum nitride ceramic substrate is between that of aluminum oxide and that of aluminum nitride, and the cost of the composite aluminum nitride ceramic substrate is lower than that of an aluminum nitride ceramic substrate in the prior art.
本发明公开了一种复合氮化铝陶瓷基板的制备方法,包括:将制备复合氮化铝陶瓷基板的原料经过原料球磨步骤、脱泡步骤、流延成型步骤、冲片步骤、叠压步骤、排胶步骤及烧结步骤得到复合氮化铝陶瓷基板成品;原料球磨步骤包括:将氮化铝粉体、导热粉体、烧结助剂、有机溶剂、分散剂送入球磨机中球磨处理;脱泡步骤包括:采用真空脱泡机对经过所述配料球磨步骤后的物料进行抽真空脱泡,得到陶瓷浆料;流延成型步骤包括:将经过脱泡步骤的陶瓷浆料送入流延机进行流延成型,并静置一定时间,得到生坯带;该复合氮化铝陶瓷基板的制备方法制得的复合氮化铝陶瓷基板的导热率在介于氧化铝和氮化铝之间的基础上,成本比现有技术的氮化铝陶瓷基片更低。
Preparation method of composite aluminum nitride ceramic substrate
一种复合氮化铝陶瓷基板的制备方法
ZHOU ZEPING (Autor:in) / ZHOU DANGSHENG (Autor:in) / LYU YIHANG (Autor:in) / XIE FENG (Autor:in) / ZHANG GANG (Autor:in)
20.10.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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