Aluminum nitride ceramic substrate and preparation method thereof: Fid-Bau Portal

Aluminum nitride ceramic substrate and preparation method thereof

SHI JUNNAN / JIANG YONGPING / ZHOU JIANCAO / MENG BIQING

The invention relates to an aluminum nitride ceramic substrate and a preparation method thereof, and belongs to the technical field of aluminum nitride ceramic substrate preparation, and the aluminum nitride ceramic substrate is prepared by the following steps: mixing modified aluminum nitride powder with zirconium oxide powder and yttrium oxide powder, carrying out ball milling to prepare slurry, adding an organic medium, and sintering to obtain the aluminum nitride ceramic substrate. The preparation method comprises the following steps: firstly preparing raw materials, then preparing a biscuit through tape casting and glue discharging treatment, then sintering the biscuit at high temperature to prepare a semi-finished product, and finally carrying out post-treatment on the semi-finished product to prepare the high-temperature-resistant high-strength wear-resistant ceramic tile, which comprises the following steps: step 1, preparing and modifying the raw materials; step 2, ball-milling and pulping; step 3, tape casting; 4, glue discharging and high-temperature sintering; in the preparation process, the content of organic matters in the aluminum nitride ceramic substrate can be reduced by changing the temperature and time during glue discharging, so that the thermal conductivity, the bending strength and the fracture toughness of the aluminum nitride ceramic substrate are improved.

本发明涉及一种氮化铝陶瓷基板及其制备方法，属于氮化铝陶瓷基板制备技术领域，氮化铝陶瓷基板是通过改性后的氮化铝粉末混合氧化锆粉末和氧化钇粉末经球磨制成浆料后添加有机介质，随后通过流延成型和排胶处理的操作后制成素坯，然后将素坯进行高温烧结制成半成品，最后将半成品进行后处理制备而成，包括以下步骤：步骤一、原料准备和改性；步骤二、球磨制浆；步骤三、流延成型；步骤四、排胶和高温烧结；步骤五、后处理和评估，在制备时，通过改变排胶时的温度和时间，从而能减少氮化铝陶瓷基板中有机物的含量，从而提高氮化铝陶瓷基板的热导性、抗弯强度和断裂韧性。

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