Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Molybdenum-silicon target material and powder mixing method and preparation method for improving density of molybdenum-silicon target material
The invention provides a molybdenum-silicon target material and a powder mixing method and a preparation method for improving the density of the molybdenum-silicon target material, and the powder mixing method comprises the following steps: mixing silicon powder and molybdenum disilicide powder, and carrying out ball milling to obtain a mixture; the preparation method comprises the steps that a mixture is heated to the sintering temperature and pressurized to the sintering pressure, heat preservation and pressure maintaining are carried out, sintering is completed, and the molybdenum-silicon target material is obtained. According to the method, the silicon powder and the molybdenum disilicide powder are mixed, ball milling process parameters are strictly controlled to ensure the powder mixing uniformity, the sintering temperature is controlled to ensure that the phenomena of oxidation, segregation and other uneven phase structures do not occur in the sintering process while densification of the molybdenum-silicon target material is achieved, and the compact and high-purity molybdenum-silicon target material is prepared.
本发明提供一种钼硅靶材及提高其致密度的混粉方法和制备方法，所述混粉方法包括：混合硅粉和二硅化钼粉，并经球磨，得到混合料；所述制备方法包括：混合料经升温至烧结的温度，并加压至烧结的压力，进行保温保压，完成烧结，得到钼硅靶材。本发明通过采用硅粉和二硅化钼粉进行混合，并对球磨工艺参数严格控制保证混粉均匀性，通过对烧结温度的控制在实现钼硅靶材致密化的同时保证烧结过程中不出现氧化、偏析等物相组织不均匀的现象，制备出致密的、高纯的钼硅靶材。
Molybdenum-silicon target material and powder mixing method and preparation method for improving density of molybdenum-silicon target material
The invention provides a molybdenum-silicon target material and a powder mixing method and a preparation method for improving the density of the molybdenum-silicon target material, and the powder mixing method comprises the following steps: mixing silicon powder and molybdenum disilicide powder, and carrying out ball milling to obtain a mixture; the preparation method comprises the steps that a mixture is heated to the sintering temperature and pressurized to the sintering pressure, heat preservation and pressure maintaining are carried out, sintering is completed, and the molybdenum-silicon target material is obtained. According to the method, the silicon powder and the molybdenum disilicide powder are mixed, ball milling process parameters are strictly controlled to ensure the powder mixing uniformity, the sintering temperature is controlled to ensure that the phenomena of oxidation, segregation and other uneven phase structures do not occur in the sintering process while densification of the molybdenum-silicon target material is achieved, and the compact and high-purity molybdenum-silicon target material is prepared.
本发明提供一种钼硅靶材及提高其致密度的混粉方法和制备方法，所述混粉方法包括：混合硅粉和二硅化钼粉，并经球磨，得到混合料；所述制备方法包括：混合料经升温至烧结的温度，并加压至烧结的压力，进行保温保压，完成烧结，得到钼硅靶材。本发明通过采用硅粉和二硅化钼粉进行混合，并对球磨工艺参数严格控制保证混粉均匀性，通过对烧结温度的控制在实现钼硅靶材致密化的同时保证烧结过程中不出现氧化、偏析等物相组织不均匀的现象，制备出致密的、高纯的钼硅靶材。
Molybdenum-silicon target material and powder mixing method and preparation method for improving density of molybdenum-silicon target material
一种钼硅靶材及提高其致密度的混粉方法和制备方法
YAO LIJUN (Autor:in) / PAN JIE (Autor:in) / LI SHUANG (Autor:in) / LIAO PEIJUN (Autor:in) / HUANG DONGCHANG (Autor:in)
10.11.2023
Patent
Elektronische Ressource
Chinesisch
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