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Preparation method of TiSiBN interface coating on surface of ceramic fiber
The invention discloses a preparation method of a ceramic fiber surface TiSiBN interface coating, which comprises the following steps: placing ceramic fibers in a muffle furnace to remove a sizing agent, and placing the ceramic fibers after the sizing agent is removed in a deposition furnace; starting a vacuum system to vacuumize the deposition furnace, introducing argon into the deposition furnace, and then starting a heating system to heat; after heating is finished, argon introduction is stopped, and the vacuum degree is reduced; four reaction gases of H2, NH3, BCl3 and TiCl4 are sequentially introduced into the deposition furnace, then two reaction gases of TiCl4 and SiCl4 are simultaneously introduced into the deposition furnace, and the reaction gases are subjected to chemical vapor deposition on the surface of the ceramic fiber; and after chemical vapor deposition is finished, gas channels of TiCl4, SiCl4, BCl3, NH3 and H2 are sequentially closed, then argon is introduced into the deposition furnace to normal pressure, a heating system and a vacuum system are closed, and the TiSiBN interface coating can be prepared on the surface of the ceramic fiber. The oxidation resistance and water and oxygen resistance of the interface coating are improved by adding Ti and Si into BN.
本发明公开了一种陶瓷纤维表面TiSiBN界面涂层的制备方法，包括以下步骤：将陶瓷纤维放置于马弗炉内去除上浆剂，并将去除上浆剂后的陶瓷纤维放入沉积炉内；开启真空系统对沉积炉内抽真空，同时向沉积炉内通入氩气，然后开启加热系统进行加热；待加热结束后，停止通入氩气，降低真空度；依次向沉积炉内通入H2、NH3、BCl3和TiCl4四种反应气体，然后同时向沉积炉内通入TiCl4和SiCl4两种反应气体，反应气体在陶瓷纤维表面进行化学气相沉积；待化学气相沉积结束后，依次关闭TiCl4、SiCl4、BCl3、NH3和H2的气体通道，然后向沉积炉内通入氩气至常压，关闭加热系统和真空系统，即可在陶瓷纤维表面制得TiSiBN界面涂层。本发明通过在BN中添加Ti和Si来提高界面涂层的抗氧化性和抗水氧性。
Preparation method of TiSiBN interface coating on surface of ceramic fiber
The invention discloses a preparation method of a ceramic fiber surface TiSiBN interface coating, which comprises the following steps: placing ceramic fibers in a muffle furnace to remove a sizing agent, and placing the ceramic fibers after the sizing agent is removed in a deposition furnace; starting a vacuum system to vacuumize the deposition furnace, introducing argon into the deposition furnace, and then starting a heating system to heat; after heating is finished, argon introduction is stopped, and the vacuum degree is reduced; four reaction gases of H2, NH3, BCl3 and TiCl4 are sequentially introduced into the deposition furnace, then two reaction gases of TiCl4 and SiCl4 are simultaneously introduced into the deposition furnace, and the reaction gases are subjected to chemical vapor deposition on the surface of the ceramic fiber; and after chemical vapor deposition is finished, gas channels of TiCl4, SiCl4, BCl3, NH3 and H2 are sequentially closed, then argon is introduced into the deposition furnace to normal pressure, a heating system and a vacuum system are closed, and the TiSiBN interface coating can be prepared on the surface of the ceramic fiber. The oxidation resistance and water and oxygen resistance of the interface coating are improved by adding Ti and Si into BN.
本发明公开了一种陶瓷纤维表面TiSiBN界面涂层的制备方法，包括以下步骤：将陶瓷纤维放置于马弗炉内去除上浆剂，并将去除上浆剂后的陶瓷纤维放入沉积炉内；开启真空系统对沉积炉内抽真空，同时向沉积炉内通入氩气，然后开启加热系统进行加热；待加热结束后，停止通入氩气，降低真空度；依次向沉积炉内通入H2、NH3、BCl3和TiCl4四种反应气体，然后同时向沉积炉内通入TiCl4和SiCl4两种反应气体，反应气体在陶瓷纤维表面进行化学气相沉积；待化学气相沉积结束后，依次关闭TiCl4、SiCl4、BCl3、NH3和H2的气体通道，然后向沉积炉内通入氩气至常压，关闭加热系统和真空系统，即可在陶瓷纤维表面制得TiSiBN界面涂层。本发明通过在BN中添加Ti和Si来提高界面涂层的抗氧化性和抗水氧性。
Preparation method of TiSiBN interface coating on surface of ceramic fiber
陶瓷纤维表面TiSiBN界面涂层的制备方法
LYU XIAOXU (Autor:in) / SUN JIAJIA (Autor:in) / JIAO JIAN (Autor:in) / LIU WEI (Autor:in) / LI QI (Autor:in)
10.11.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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