Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of high-density germanium diselenide target material
The invention provides a preparation method of a high-density germanium diselenide target material. The preparation method comprises the following steps: (1) loading: sequentially arranging graphite paper, a supporting plate and graphite paper which are matched with a side wall on the side wall of a mold; sequentially padding graphite paper, a supporting plate and graphite paper at the bottom of the mold, then loading a layer of germanium diselenide powder, tamping, and then continuously loading n layers of germanium diselenide powder according to the loading sequence of the graphite paper, the supporting plate, the graphite paper and the germanium diselenide powder layer until the last layer of germanium diselenide powder is loaded, and then, graphite paper, a supporting plate and graphite paper are sequentially arranged in a padding mode, and finally mold packaging is completed. (2) carrying out degassing and isostatic pressing sintering treatment on the mounted mold; and (3) discharging, demolding and machining to obtain the target material. According to the preparation method, the single-layer, double-layer or multi-layer high-density germanium diselenide target material can be prepared, the target material does not deform, the density of the target material can reach 97% or above, and compared with a hot pressing mode, the density is greatly improved.
本发明提供高致密度二硒化锗靶材的制备方法，包括：（1）装料：在模具的侧壁依次设置与侧壁适配的石墨纸、支撑板、石墨纸；在模具的底部依次垫设石墨纸、支撑板、石墨纸，然后装入一层二硒化锗粉末，夯实后再按照石墨纸‑支撑板‑石墨纸‑二硒化锗粉末层的装料顺序，继续装入n层的二硒化锗粉末，直至装完最后一层二硒化锗粉末，再依次垫设石墨纸、支撑板、石墨纸，最后完成模具封装；（2）将安装好的模具进行除气、等静压烧结处理；（3）出炉、脱模、机加工，得到靶材。该制备方法可以制备单层、双层或多层装的高致密度二硒化锗靶材，靶材不存在变形的现象，且靶材致密度可以达到97%以上，相比于热压方式致密度大幅提高。
Preparation method of high-density germanium diselenide target material
The invention provides a preparation method of a high-density germanium diselenide target material. The preparation method comprises the following steps: (1) loading: sequentially arranging graphite paper, a supporting plate and graphite paper which are matched with a side wall on the side wall of a mold; sequentially padding graphite paper, a supporting plate and graphite paper at the bottom of the mold, then loading a layer of germanium diselenide powder, tamping, and then continuously loading n layers of germanium diselenide powder according to the loading sequence of the graphite paper, the supporting plate, the graphite paper and the germanium diselenide powder layer until the last layer of germanium diselenide powder is loaded, and then, graphite paper, a supporting plate and graphite paper are sequentially arranged in a padding mode, and finally mold packaging is completed. (2) carrying out degassing and isostatic pressing sintering treatment on the mounted mold; and (3) discharging, demolding and machining to obtain the target material. According to the preparation method, the single-layer, double-layer or multi-layer high-density germanium diselenide target material can be prepared, the target material does not deform, the density of the target material can reach 97% or above, and compared with a hot pressing mode, the density is greatly improved.
本发明提供高致密度二硒化锗靶材的制备方法，包括：（1）装料：在模具的侧壁依次设置与侧壁适配的石墨纸、支撑板、石墨纸；在模具的底部依次垫设石墨纸、支撑板、石墨纸，然后装入一层二硒化锗粉末，夯实后再按照石墨纸‑支撑板‑石墨纸‑二硒化锗粉末层的装料顺序，继续装入n层的二硒化锗粉末，直至装完最后一层二硒化锗粉末，再依次垫设石墨纸、支撑板、石墨纸，最后完成模具封装；（2）将安装好的模具进行除气、等静压烧结处理；（3）出炉、脱模、机加工，得到靶材。该制备方法可以制备单层、双层或多层装的高致密度二硒化锗靶材，靶材不存在变形的现象，且靶材致密度可以达到97%以上，相比于热压方式致密度大幅提高。
Preparation method of high-density germanium diselenide target material
一种高致密度二硒化锗靶材的制备方法
HOU LONGQUAN (Autor:in) / OU HAILING (Autor:in) / MA GUOCHENG (Autor:in) / LU WEIZHEN (Autor:in)
05.12.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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