Zinc-cadmium-oxygen target material and preparation method thereof: Fid-Bau Portal

Zinc-cadmium-oxygen target material and preparation method thereof

WEN CHONGBIN / ZHU LIU / TONG PEIYUN

The invention belongs to the technical field of target material production, and discloses a preparation method of a zinc-cadmium-oxygen target material, the zinc-cadmium-oxygen target material with good relative density is obtained through a preparation mode of primary material mixing, primary sintering, secondary material mixing and hot isostatic pressing, and the zinc-cadmium-oxygen target material with good relative density is obtained through oxygen supplementation sintering in the primary sintering process. According to the method, oxygen consumed by a reducing atmosphere provided by a graphite mold in the hot isostatic pressing process is counteracted to a certain extent, so that the oxygen content is easier to control in the preparation process of the zinc-cadmium-oxygen target material, and in addition, the invention further discloses the zinc-cadmium-oxygen target material.

本申请属于靶材生产技术领域，公开了一种锌镉氧靶材的制备方法，该方法通过一次混料、一次烧结、二次混料、热等静压的制备方式，得到了一种相对密度良好的锌镉氧靶材，并且，该方法通过在一次烧结过程中进行补氧烧结，一定程度抵消了热等静压过程中石墨模具提供的还原气氛所消耗的氧气，使得在锌镉氧靶材的制备过程中，氧含量更加容易控制，此外，本申请还公开了一种锌镉氧靶材。

Zugriff

Download

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren