Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Zinc oxide target material and preparation method thereof
The invention belongs to the technical field of target material preparation, and discloses a preparation method of a zinc oxide target material, which comprises the following steps: mixing zinc oxide powder, aluminum oxide powder and gallium oxide powder, carrying out spray granulation to obtain powder, carrying out primary hot pressed sintering and secondary hot pressed sintering on the prepared powder, and cooling and depressurizing to obtain the zinc oxide target material. Wherein in the primary hot pressing sintering process, the temperature is 400-600 DEG C, and the pressure is 2-4 MPa, and in the secondary hot pressing sintering process, the temperature is 1200-1300 DEG C, and the pressure is 20-30 MPa. Through the hot pressing sintering mode, the temperature needed by crystal growth of the target material can be effectively reduced, and then the sintering temperature of the zinc oxide target material is reduced, so that generation of zinc aluminate is reduced, and the yield of the zinc oxide target material is improved. In addition, the invention further discloses a zinc oxide target material.
本申请属于靶材制备技术领域，公开了一种氧化锌靶材的制备方法，该方案先将氧化锌粉末、氧化铝粉末、氧化镓粉末混合，喷雾造粒，得到粉体，再将制得的粉体进行一次热压烧结，二次热压烧结随后降温降压，得到氧化锌靶材，其中在一次热压烧结过程中，温度为400～600℃，压力为2～4MPa，在二次热压烧结过程中，温度为1200～1300℃，压力为20～30MPa，本申请通过热压烧结的方式，能够有效地降低靶材的晶体生长所需温度，进而降低氧化锌靶材的烧结温度，从而减少铝酸锌的生成，进而降低电导率的减少，此外，本申请还公开了一种氧化锌靶材。
Zinc oxide target material and preparation method thereof
The invention belongs to the technical field of target material preparation, and discloses a preparation method of a zinc oxide target material, which comprises the following steps: mixing zinc oxide powder, aluminum oxide powder and gallium oxide powder, carrying out spray granulation to obtain powder, carrying out primary hot pressed sintering and secondary hot pressed sintering on the prepared powder, and cooling and depressurizing to obtain the zinc oxide target material. Wherein in the primary hot pressing sintering process, the temperature is 400-600 DEG C, and the pressure is 2-4 MPa, and in the secondary hot pressing sintering process, the temperature is 1200-1300 DEG C, and the pressure is 20-30 MPa. Through the hot pressing sintering mode, the temperature needed by crystal growth of the target material can be effectively reduced, and then the sintering temperature of the zinc oxide target material is reduced, so that generation of zinc aluminate is reduced, and the yield of the zinc oxide target material is improved. In addition, the invention further discloses a zinc oxide target material.
本申请属于靶材制备技术领域，公开了一种氧化锌靶材的制备方法，该方案先将氧化锌粉末、氧化铝粉末、氧化镓粉末混合，喷雾造粒，得到粉体，再将制得的粉体进行一次热压烧结，二次热压烧结随后降温降压，得到氧化锌靶材，其中在一次热压烧结过程中，温度为400～600℃，压力为2～4MPa，在二次热压烧结过程中，温度为1200～1300℃，压力为20～30MPa，本申请通过热压烧结的方式，能够有效地降低靶材的晶体生长所需温度，进而降低氧化锌靶材的烧结温度，从而减少铝酸锌的生成，进而降低电导率的减少，此外，本申请还公开了一种氧化锌靶材。
Zinc oxide target material and preparation method thereof
一种氧化锌靶材及其制备方法
LI KAIJIE (Autor:in) / WANG QIFENG (Autor:in) / LUO SISHI (Autor:in) / GU DESHENG (Autor:in) / ZHANG XINGYU (Autor:in)
12.11.2024
Patent
Elektronische Ressource
Chinesisch
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