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Preparation method of tellurium-zinc-cadmium target material
The invention provides a preparation method of a tellurium-zinc-cadmium target material, the preparation method comprises the following steps: mixing tellurium powder, zinc powder and cadmium powder to obtain mixed powder; and carrying out vacuum hot pressed sintering on the mixed powder to obtain the tellurium-zinc-cadmium target material. According to the preparation method of the tellurium-zinc-cadmium target material, the relative density of the prepared tellurium-zinc-cadmium target material is larger than 99%, free cadmium and free tellurium are smaller than 200 ppm, the process is simple, the tellurium-zinc-cadmium target material is synthesized by directly adopting the three kinds of powder, cadmium telluride and zinc telluride do not need to be synthesized, process operation is reduced, and cost is saved.
本发明提供了一种碲锌镉靶材的制备方法,包括:将碲粉、锌粉和镉粉混合,得到混合粉体;将所述混合粉体进行真空热压烧结,得到碲锌镉靶材。本发明提供的碲锌镉靶材的制备方法,制备得到的碲锌镉靶材相对密度大于99%,游离镉和游离碲小于200ppm,而且工艺简单,本发明直接采用三种粉末合成碲锌镉靶材,不需合成碲化镉和碲化锌,减少工艺操作,节约成本。
Preparation method of tellurium-zinc-cadmium target material
The invention provides a preparation method of a tellurium-zinc-cadmium target material, the preparation method comprises the following steps: mixing tellurium powder, zinc powder and cadmium powder to obtain mixed powder; and carrying out vacuum hot pressed sintering on the mixed powder to obtain the tellurium-zinc-cadmium target material. According to the preparation method of the tellurium-zinc-cadmium target material, the relative density of the prepared tellurium-zinc-cadmium target material is larger than 99%, free cadmium and free tellurium are smaller than 200 ppm, the process is simple, the tellurium-zinc-cadmium target material is synthesized by directly adopting the three kinds of powder, cadmium telluride and zinc telluride do not need to be synthesized, process operation is reduced, and cost is saved.
本发明提供了一种碲锌镉靶材的制备方法,包括:将碲粉、锌粉和镉粉混合,得到混合粉体;将所述混合粉体进行真空热压烧结,得到碲锌镉靶材。本发明提供的碲锌镉靶材的制备方法,制备得到的碲锌镉靶材相对密度大于99%,游离镉和游离碲小于200ppm,而且工艺简单,本发明直接采用三种粉末合成碲锌镉靶材,不需合成碲化镉和碲化锌,减少工艺操作,节约成本。
Preparation method of tellurium-zinc-cadmium target material
一种碲锌镉靶材的制备方法
WEN CHONGBIN (Autor:in) / WANG YINGJIE (Autor:in) / ZHU LIU (Autor:in) / TONG PEIYUN (Autor:in)
22.10.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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