Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The invention relates to a preparation method of a high-quality lead zirconate titanate crystal film, and relates to the technical field of functional materials. The preparation method comprises the following steps: mixing a lead source with a solvent, heating for reaction, cooling, and adding a zirconium source and a titanium source for reaction to obtain a PZT precursor solution; preparing a seed layer by taking a lanthanide substance as a target material and utilizing a magnetron sputtering method; and then coating the surface of the seed layer with a PZT precursor solution, and carrying out pyrolysis and annealing treatment to obtain the lead zirconate titanate crystal film. The stable PZT precursor solution is prepared through a sol-gel method, the smooth and crack-free high-quality PZT crystal film with (100) preferred orientation is prepared through the seed layer, and the method has the advantages of being simple in preparation process, convenient to operate, easy in raw material obtaining and low in preparation cost.
本发明涉及一种高质量锆钛酸铅晶体薄膜的制备方法，涉及功能材料技术领域。本发明制备过程包括以下步骤：将铅源与溶剂混合，加热反应后冷却，之后加入锆源和钛源进行反应，得到PZT前驱体溶液；以镧系物质为靶材，利用磁控溅射法制备种子层；之后将PZT前驱体溶液涂覆于种子层表面，经热解、退火处理后得到锆钛酸铅晶体薄膜。本发明通过溶胶‑凝胶法制备出稳定的PZT前驱体溶液，并利用种子层制备出光滑无裂痕、具有(100)择优取向的高质量PZT晶体薄膜，具有制备工艺简单、操作方便、原料易得、制备成本较低的特点。
The invention relates to a preparation method of a high-quality lead zirconate titanate crystal film, and relates to the technical field of functional materials. The preparation method comprises the following steps: mixing a lead source with a solvent, heating for reaction, cooling, and adding a zirconium source and a titanium source for reaction to obtain a PZT precursor solution; preparing a seed layer by taking a lanthanide substance as a target material and utilizing a magnetron sputtering method; and then coating the surface of the seed layer with a PZT precursor solution, and carrying out pyrolysis and annealing treatment to obtain the lead zirconate titanate crystal film. The stable PZT precursor solution is prepared through a sol-gel method, the smooth and crack-free high-quality PZT crystal film with (100) preferred orientation is prepared through the seed layer, and the method has the advantages of being simple in preparation process, convenient to operate, easy in raw material obtaining and low in preparation cost.
本发明涉及一种高质量锆钛酸铅晶体薄膜的制备方法，涉及功能材料技术领域。本发明制备过程包括以下步骤：将铅源与溶剂混合，加热反应后冷却，之后加入锆源和钛源进行反应，得到PZT前驱体溶液；以镧系物质为靶材，利用磁控溅射法制备种子层；之后将PZT前驱体溶液涂覆于种子层表面，经热解、退火处理后得到锆钛酸铅晶体薄膜。本发明通过溶胶‑凝胶法制备出稳定的PZT前驱体溶液，并利用种子层制备出光滑无裂痕、具有(100)择优取向的高质量PZT晶体薄膜，具有制备工艺简单、操作方便、原料易得、制备成本较低的特点。
Preparation method of high-quality lead zirconate titanate crystal film
一种高质量锆钛酸铅晶体薄膜的制备方法
HAN YU (Autor:in)
08.12.2023
Patent
Elektronische Ressource
Chinesisch
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