Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Laser-assisted method for preparing ceramic and metal composite substrate and composite substrate
The invention discloses a laser-assisted method for preparing a ceramic and metal composite substrate, which comprises the following steps that: ceramic and metal are pretreated, the material of the ceramic is silicon nitride, aluminum nitride or aluminum oxide, and the material of the metal is aluminum or copper; placing the pretreated ceramic on a laser processing platform, and performing laser irradiation on the surface of the ceramic in a vacuum or inert gas protection state so as to realize modification of the surface of the ceramic; the modified ceramic and the pretreated metal are stacked to obtain a connection structure, the connection structure is placed in a vacuum diffusion connection device, the ceramic is located above the metal, and the connection structure is heated and pressurized to achieve direct diffusion connection of the ceramic and the metal. According to the method, the connection temperature of the ceramic and the metal can be remarkably reduced, and the connection cost is reduced. The invention further provides the composite substrate which is prepared by the method.
本发明公开了一种激光辅助制备陶瓷与金属复合基板方法，包括：将陶瓷和金属进行预处理，其中陶瓷的材质为氮化硅、氮化铝或氧化铝，金属的材质为铝或铜；将预处理后的陶瓷放置在激光加工平台上，在真空或惰性气体的保护状态下对陶瓷表面进行激光照射，以实现陶瓷表面的改性；将改性后的陶瓷和预处理后的金属层叠设置得到连接结构，并将连接结构放置于真空扩散连接装置内，其中陶瓷位于金属的上方，对连接结构进行加热加压，以实现陶瓷和金属的直接扩散连接。上述的方法能够使得陶瓷与金属的连接温度显著降低，降低了连接成本。本发明还提出了一种复合基板，采用上述的方法制备。
Laser-assisted method for preparing ceramic and metal composite substrate and composite substrate
The invention discloses a laser-assisted method for preparing a ceramic and metal composite substrate, which comprises the following steps that: ceramic and metal are pretreated, the material of the ceramic is silicon nitride, aluminum nitride or aluminum oxide, and the material of the metal is aluminum or copper; placing the pretreated ceramic on a laser processing platform, and performing laser irradiation on the surface of the ceramic in a vacuum or inert gas protection state so as to realize modification of the surface of the ceramic; the modified ceramic and the pretreated metal are stacked to obtain a connection structure, the connection structure is placed in a vacuum diffusion connection device, the ceramic is located above the metal, and the connection structure is heated and pressurized to achieve direct diffusion connection of the ceramic and the metal. According to the method, the connection temperature of the ceramic and the metal can be remarkably reduced, and the connection cost is reduced. The invention further provides the composite substrate which is prepared by the method.
本发明公开了一种激光辅助制备陶瓷与金属复合基板方法，包括：将陶瓷和金属进行预处理，其中陶瓷的材质为氮化硅、氮化铝或氧化铝，金属的材质为铝或铜；将预处理后的陶瓷放置在激光加工平台上，在真空或惰性气体的保护状态下对陶瓷表面进行激光照射，以实现陶瓷表面的改性；将改性后的陶瓷和预处理后的金属层叠设置得到连接结构，并将连接结构放置于真空扩散连接装置内，其中陶瓷位于金属的上方，对连接结构进行加热加压，以实现陶瓷和金属的直接扩散连接。上述的方法能够使得陶瓷与金属的连接温度显著降低，降低了连接成本。本发明还提出了一种复合基板，采用上述的方法制备。
Laser-assisted method for preparing ceramic and metal composite substrate and composite substrate
激光辅助制备陶瓷与金属复合基板方法及复合基板
SONG YANYU (Autor:in) / CHEN NAIBIN (Autor:in) / LIU DUO (Autor:in) / ZHU HAITAO (Autor:in) / HU SHENGPENG (Autor:in) / SONG XIAOGUO (Autor:in)
13.02.2024
Patent
Elektronische Ressource
Chinesisch
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