Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Adsorption member and method for manufacturing same
This adsorption member is provided with a substrate comprising a ceramic containing silicon carbide as a main component, and a plurality of protrusions formed on the surface of the substrate, the protrusions having: a placement section having a placement surface on which an object to be processed is placed; and a support section that supports the placement section, the placement section being configured from films containing, as a main component, at least one type of material selected from silicon carbide, diamond-like carbon, amorphous silicon, molybdenum, chromium, and tantalum, and the films being independent from each other in each of the protruding sections.
本公开的吸附构件具备由作为主要成分而包含碳化硅的陶瓷构成的基板、以及形成于该基板的表面的多个突起部，突起部具有：载置部，其具有用于载置被处理体的载置面；以及支承部，其支承该载置部，载置部由作为主要成分而包含从碳化硅、类金刚石碳、非晶质硅、钼、铬以及钽中选出的至少一种的膜构成，膜在每个突起部彼此独立。
Adsorption member and method for manufacturing same
This adsorption member is provided with a substrate comprising a ceramic containing silicon carbide as a main component, and a plurality of protrusions formed on the surface of the substrate, the protrusions having: a placement section having a placement surface on which an object to be processed is placed; and a support section that supports the placement section, the placement section being configured from films containing, as a main component, at least one type of material selected from silicon carbide, diamond-like carbon, amorphous silicon, molybdenum, chromium, and tantalum, and the films being independent from each other in each of the protruding sections.
本公开的吸附构件具备由作为主要成分而包含碳化硅的陶瓷构成的基板、以及形成于该基板的表面的多个突起部，突起部具有：载置部，其具有用于载置被处理体的载置面；以及支承部，其支承该载置部，载置部由作为主要成分而包含从碳化硅、类金刚石碳、非晶质硅、钼、铬以及钽中选出的至少一种的膜构成，膜在每个突起部彼此独立。
Adsorption member and method for manufacturing same
吸附构件以及其制造方法
HARADA MASAHIRO (Autor:in)
23.02.2024
Patent
Elektronische Ressource
Chinesisch
AIR-PERMEABLE MEMBER, MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, PLUG, AND ADSORPTION MEMBER
| Europäisches Patentamt | 2023