Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ADSORPTION MEMBER AND MANUFACTURING METHOD THEREOF
To provide an adsorption member capable of highly accurately processing the surface of an object to be adsorbed and held by an adsorption surface.SOLUTION: An adsorption member according to the present disclosure includes an adsorption portion having an adsorption surface for adsorbing and holding an object to be adsorbed, and a support portion having a concave portion for mounting the adsorption portion and an annular surface surrounding the adsorption surface. A first layer that joins the adsorption portion and the support portion is positioned between the upper end of the outer peripheral surface of the adsorption portion and the upper end of the inner peripheral surface of the support portion.SELECTED DRAWING: Figure 1
【課題】吸着面に吸着して保持した被吸着体の表面を高精度で加工することができる吸着用部材を提供すること。【解決手段】本開示に係る吸着用部材は、被吸着体を吸着および保持するための吸着面を有する吸着部と、吸着部を装着するための凹部および吸着面を囲繞する環状面を有する支持部とを含む。吸着部の外周面上端部と支持部の内周面上端部との間に、吸着部と支持部とを接合する第１層が位置している。【選択図】図１
ADSORPTION MEMBER AND MANUFACTURING METHOD THEREOF
To provide an adsorption member capable of highly accurately processing the surface of an object to be adsorbed and held by an adsorption surface.SOLUTION: An adsorption member according to the present disclosure includes an adsorption portion having an adsorption surface for adsorbing and holding an object to be adsorbed, and a support portion having a concave portion for mounting the adsorption portion and an annular surface surrounding the adsorption surface. A first layer that joins the adsorption portion and the support portion is positioned between the upper end of the outer peripheral surface of the adsorption portion and the upper end of the inner peripheral surface of the support portion.SELECTED DRAWING: Figure 1
【課題】吸着面に吸着して保持した被吸着体の表面を高精度で加工することができる吸着用部材を提供すること。【解決手段】本開示に係る吸着用部材は、被吸着体を吸着および保持するための吸着面を有する吸着部と、吸着部を装着するための凹部および吸着面を囲繞する環状面を有する支持部とを含む。吸着部の外周面上端部と支持部の内周面上端部との間に、吸着部と支持部とを接合する第１層が位置している。【選択図】図１
ADSORPTION MEMBER AND MANUFACTURING METHOD THEREOF
吸着用部材およびその製造方法
TANAKA MANPEI (Autor:in) / YOSHIMURA SATORU (Autor:in)
09.02.2023
Patent
Elektronische Ressource
Japanisch
AIR-PERMEABLE MEMBER, MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, PLUG, AND ADSORPTION MEMBER
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