Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of double-layer tantalum carbide coating and graphite component
The invention relates to the technical field of semiconductors, in particular to a preparation method of a double-layer tantalum carbide coating and a graphite component. According to the preparation method of the double-layer tantalum carbide coating, the formed first tantalum carbide coating is a loose and porous coating, so that large thermal stress in the sintered first tantalum carbide coating is released through a loose and porous structure, and the first tantalum carbide coating is better combined with a graphite part; the first tantalum carbide coating is prevented from falling off from the surface of the graphite base material; the second tantalum carbide coating formed on the surface of the first tantalum carbide coating is a compact coating, and the second tantalum carbide coating and the first tantalum carbide coating are both made of tantalum carbide, so that the thermal stress difference between the second tantalum carbide coating and the first tantalum carbide coating is small; the first tantalum carbide coating and the second tantalum carbide coating are more easily and tightly combined, so that the obtained double coatings are more compact, and the obtained graphite component with the double coatings is more durable.
本发明涉及半导体技术领域，特别涉及一种双层碳化钽涂层的制备方法及石墨部件。一种双层碳化钽涂层的制备方法形成所述第一碳化钽涂层为疏松多孔的涂层，使得烧结后的第一碳化钽涂层内部较大的热应力通过疏松多孔的结构进行释放，第一碳化钽涂层与石墨部件更好的结合，避免了第一碳化钽涂层从石墨基材表面脱落；在所述第一碳化钽涂层表面形成的所述第二碳化钽涂层为致密涂层，由于第二碳化钽涂层与所述第一碳化钽涂层的材料均为碳化钽，之间的热应力相差不大，使得所述第一碳化钽涂层与所述第二碳化钽涂层更容易紧密结合使得获得的双涂层更加致密，进而使得获得的具有双涂层的石墨部件更加耐用。
Preparation method of double-layer tantalum carbide coating and graphite component
The invention relates to the technical field of semiconductors, in particular to a preparation method of a double-layer tantalum carbide coating and a graphite component. According to the preparation method of the double-layer tantalum carbide coating, the formed first tantalum carbide coating is a loose and porous coating, so that large thermal stress in the sintered first tantalum carbide coating is released through a loose and porous structure, and the first tantalum carbide coating is better combined with a graphite part; the first tantalum carbide coating is prevented from falling off from the surface of the graphite base material; the second tantalum carbide coating formed on the surface of the first tantalum carbide coating is a compact coating, and the second tantalum carbide coating and the first tantalum carbide coating are both made of tantalum carbide, so that the thermal stress difference between the second tantalum carbide coating and the first tantalum carbide coating is small; the first tantalum carbide coating and the second tantalum carbide coating are more easily and tightly combined, so that the obtained double coatings are more compact, and the obtained graphite component with the double coatings is more durable.
本发明涉及半导体技术领域，特别涉及一种双层碳化钽涂层的制备方法及石墨部件。一种双层碳化钽涂层的制备方法形成所述第一碳化钽涂层为疏松多孔的涂层，使得烧结后的第一碳化钽涂层内部较大的热应力通过疏松多孔的结构进行释放，第一碳化钽涂层与石墨部件更好的结合，避免了第一碳化钽涂层从石墨基材表面脱落；在所述第一碳化钽涂层表面形成的所述第二碳化钽涂层为致密涂层，由于第二碳化钽涂层与所述第一碳化钽涂层的材料均为碳化钽，之间的热应力相差不大，使得所述第一碳化钽涂层与所述第二碳化钽涂层更容易紧密结合使得获得的双涂层更加致密，进而使得获得的具有双涂层的石墨部件更加耐用。
Preparation method of double-layer tantalum carbide coating and graphite component
一种双层碳化钽涂层的制备方法及石墨部件
YAN SHOULIANG (Autor:in) / XU SUOCHENG (Autor:in) / WANG MINGHUA (Autor:in) / ZHANG ZHENYUAN (Autor:in) / YUAN ZHIJIE (Autor:in) / ZHOU JIE (Autor:in) / HU TANGZHENG (Autor:in) / FENG ZHIQIANG (Autor:in)
03.05.2024
Patent
Elektronische Ressource
Chinesisch
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