Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Indium cerium oxide target as well as preparation method and application thereof
The invention discloses an indium cerium oxide target material and a preparation method and application thereof.The preparation method comprises the following steps that S1, a metal oxide powder material is prepared into slurry and then granulated to obtain spherical particles, and the metal oxide powder is prepared from, by mole, 90%-97% of In2O3 and 3%-10% of CeO2; s2, carrying out compression molding and isostatic pressing on the spherical particles to obtain a biscuit target material; and S3, sintering the biscuit target material in stages, and cooling to obtain the target material. The indium cerium oxide target material prepared by the preparation method of the indium cerium oxide target material is superior to the density of hot pressed sintering under the same condition, has the characteristics of high mobility and high transmittance after sputtering, and can be applied to the field of photovoltaic heterogeneous cells.
本发明公开了一种氧化铟铈靶材及其制备方法与应用，包括以下步骤：S1、将金属氧化物粉末材料制成浆料后造粒后得到球型颗粒，其中所述金属氧化物粉末的制备原料包括In2O3和CeO2，按摩尔百分比计，In2O3为90‑97％，CeO2为3％‑10％；S2、将所述球型颗粒进行模压成型、等静压成型后得素坯靶材；S3、将所述素坯靶材分段烧结后降温即得。本发明提出一种氧化铟铈靶材的制备方法制备得到的氧化铟铈靶材优于同等条件下热压烧结的致密度，溅射后具有高迁移率、高透过率的特点可应用于光伏异质电池领域。
Indium cerium oxide target as well as preparation method and application thereof
The invention discloses an indium cerium oxide target material and a preparation method and application thereof.The preparation method comprises the following steps that S1, a metal oxide powder material is prepared into slurry and then granulated to obtain spherical particles, and the metal oxide powder is prepared from, by mole, 90%-97% of In2O3 and 3%-10% of CeO2; s2, carrying out compression molding and isostatic pressing on the spherical particles to obtain a biscuit target material; and S3, sintering the biscuit target material in stages, and cooling to obtain the target material. The indium cerium oxide target material prepared by the preparation method of the indium cerium oxide target material is superior to the density of hot pressed sintering under the same condition, has the characteristics of high mobility and high transmittance after sputtering, and can be applied to the field of photovoltaic heterogeneous cells.
本发明公开了一种氧化铟铈靶材及其制备方法与应用，包括以下步骤：S1、将金属氧化物粉末材料制成浆料后造粒后得到球型颗粒，其中所述金属氧化物粉末的制备原料包括In2O3和CeO2，按摩尔百分比计，In2O3为90‑97％，CeO2为3％‑10％；S2、将所述球型颗粒进行模压成型、等静压成型后得素坯靶材；S3、将所述素坯靶材分段烧结后降温即得。本发明提出一种氧化铟铈靶材的制备方法制备得到的氧化铟铈靶材优于同等条件下热压烧结的致密度，溅射后具有高迁移率、高透过率的特点可应用于光伏异质电池领域。
Indium cerium oxide target as well as preparation method and application thereof
一种氧化铟铈靶材及其制备方法与应用
GAO YANG (Autor:in) / DING JINDUO (Autor:in) / LI QIANG (Autor:in) / GE CHUNQIAO (Autor:in)
28.06.2024
Patent
Elektronische Ressource
Chinesisch
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