Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Indium titanium tantalum cerium oxide target material and preparation method thereof
The invention belongs to the field of target material preparation, and discloses an indium titanium tantalum cerium oxide target material with a controllable grain size and a preparation method thereof. Comprising the following steps: weighing powder according to a mass ratio; mixing and dispersing the weighed powder with a dispersing agent and a binding agent, and performing wet grinding to obtain mixed slurry; carrying out spray granulation by taking the mixed slurry as a raw material to obtain mixed oxide powder; carrying out compression molding by taking the mixed oxide powder as a raw material to obtain a target blank; the target blank is sequentially subjected to degreasing heat treatment and sintering heat treatment, the indium titanium tantalum cerium oxide target material is obtained, the highest sintering temperature of the sintering heat treatment is 1350-1500 DEG C, and the highest temperature holding time is 15-30 h. The prepared indium titanium tantalum cerium oxide target material is high in relative density and good in component distribution uniformity. According to the preparation method, the grain size of the target material can be regulated and controlled at the same time, parameter requirements of different customers on the target material are actively met, and the applicability of the indium titanium tantalum cerium oxide target material is greatly expanded.
本发明属于靶材制备领域，公开了一种晶粒尺寸可控的氧化铟钛钽铈靶材及其制备方法。包括以下步骤：按质量比称取粉末；将称取的粉末与分散剂、粘结剂混合分散，经过湿法研磨得到混合浆料；以混合浆料为原料进行喷雾造粒，得到混合氧化物粉末；以混合氧化物粉末为原料进行压制成型，得到靶坯；将靶坯依次进行脱脂热处理、烧结热处理，得氧化铟钛钽铈靶材，所述烧结热处理的最高烧结温度为1350~1500℃、最高温保温时间为15~30h。制备得到的氧化铟钛钽铈靶材，相对密度高、成分分布均匀性好。制备方法可以同时调控靶材晶粒尺寸，主动适应不同客户对靶材的参数需求，极大扩展了氧化铟钛钽铈靶材的适用性。
Indium titanium tantalum cerium oxide target material and preparation method thereof
The invention belongs to the field of target material preparation, and discloses an indium titanium tantalum cerium oxide target material with a controllable grain size and a preparation method thereof. Comprising the following steps: weighing powder according to a mass ratio; mixing and dispersing the weighed powder with a dispersing agent and a binding agent, and performing wet grinding to obtain mixed slurry; carrying out spray granulation by taking the mixed slurry as a raw material to obtain mixed oxide powder; carrying out compression molding by taking the mixed oxide powder as a raw material to obtain a target blank; the target blank is sequentially subjected to degreasing heat treatment and sintering heat treatment, the indium titanium tantalum cerium oxide target material is obtained, the highest sintering temperature of the sintering heat treatment is 1350-1500 DEG C, and the highest temperature holding time is 15-30 h. The prepared indium titanium tantalum cerium oxide target material is high in relative density and good in component distribution uniformity. According to the preparation method, the grain size of the target material can be regulated and controlled at the same time, parameter requirements of different customers on the target material are actively met, and the applicability of the indium titanium tantalum cerium oxide target material is greatly expanded.
本发明属于靶材制备领域，公开了一种晶粒尺寸可控的氧化铟钛钽铈靶材及其制备方法。包括以下步骤：按质量比称取粉末；将称取的粉末与分散剂、粘结剂混合分散，经过湿法研磨得到混合浆料；以混合浆料为原料进行喷雾造粒，得到混合氧化物粉末；以混合氧化物粉末为原料进行压制成型，得到靶坯；将靶坯依次进行脱脂热处理、烧结热处理，得氧化铟钛钽铈靶材，所述烧结热处理的最高烧结温度为1350~1500℃、最高温保温时间为15~30h。制备得到的氧化铟钛钽铈靶材，相对密度高、成分分布均匀性好。制备方法可以同时调控靶材晶粒尺寸，主动适应不同客户对靶材的参数需求，极大扩展了氧化铟钛钽铈靶材的适用性。
Indium titanium tantalum cerium oxide target material and preparation method thereof
一种氧化铟钛钽铈靶材及其制备方法
ZHANG LIHAN (Autor:in) / XU TAO (Autor:in) / LU YANGJUN (Autor:in) / WANG HENGYU (Autor:in)
06.12.2024
Patent
Elektronische Ressource
Chinesisch
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