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Carbon ceramic crucible and preparation process
The invention discloses a carbon-ceramic crucible and a preparation process thereof, carbon fibers are used as crucible raw materials, and a carbon fiber crucible blank is prepared through three-dimensional weaving, needling, sewing and other processes. The carbon fiber has high strength, so that the performance of the product is effectively ensured. Through a two-step resin densification carbonization process, a carbon-carbon material with a certain density is formed. The low-carbon-residue-rate resin such as epoxy resin is adopted as a primary densification carbon source precursor, the epoxy resin is low in carbon residue rate, product pores can be opened, the pores are opened during densification, and secondary densification is facilitated. High-carbon-residue-rate resin such as phenolic resin or furan resin is adopted as a secondary densification carbon source precursor, the phenolic resin is high in carbon residue rate, product pores can be effectively filled, and a carbon-ceramic crucible blank with a certain density is obtained. Meanwhile, a ceramic sintering process is adopted, so that boron nitride enters the interior of the carbon-ceramic crucible green body to form the carbon-ceramic crucible, boron nitride does not react with silicon, erosion of silicon steam to the carbon-ceramic crucible can be effectively prevented, and the service life of a product is prolonged.
本发明公开了一种碳陶坩埚及制备工艺,采用碳纤维作为坩埚原材料,通过三维编织、针刺、缝合等工艺制备碳纤维坩埚坯体。碳纤维具有高强度,有效保证了产品的性能。通过两步树脂增密碳化工艺,形成具有一定密度的碳碳材料。采用环氧树脂等低残碳率树脂作为一次增密碳源前驱体,环氧树脂残碳率低,可打开产品孔隙,在增密中同时打开孔隙,利于二次增密。采用酚醛树脂或呋喃树脂等高残碳率树脂为二次增密碳源前驱体,酚醛树脂残碳率高,可有效填充产品孔隙,得到具有一定密度的碳陶坩埚坯体。同时采用陶瓷烧结工艺,使氮化硼进入碳陶坩埚坯体内部,形成碳陶坩埚,氮化硼与硅不发生反应,可有效防止硅蒸汽对碳陶坩埚的侵蚀,延长了产品使用寿命。
Carbon ceramic crucible and preparation process
The invention discloses a carbon-ceramic crucible and a preparation process thereof, carbon fibers are used as crucible raw materials, and a carbon fiber crucible blank is prepared through three-dimensional weaving, needling, sewing and other processes. The carbon fiber has high strength, so that the performance of the product is effectively ensured. Through a two-step resin densification carbonization process, a carbon-carbon material with a certain density is formed. The low-carbon-residue-rate resin such as epoxy resin is adopted as a primary densification carbon source precursor, the epoxy resin is low in carbon residue rate, product pores can be opened, the pores are opened during densification, and secondary densification is facilitated. High-carbon-residue-rate resin such as phenolic resin or furan resin is adopted as a secondary densification carbon source precursor, the phenolic resin is high in carbon residue rate, product pores can be effectively filled, and a carbon-ceramic crucible blank with a certain density is obtained. Meanwhile, a ceramic sintering process is adopted, so that boron nitride enters the interior of the carbon-ceramic crucible green body to form the carbon-ceramic crucible, boron nitride does not react with silicon, erosion of silicon steam to the carbon-ceramic crucible can be effectively prevented, and the service life of a product is prolonged.
本发明公开了一种碳陶坩埚及制备工艺,采用碳纤维作为坩埚原材料,通过三维编织、针刺、缝合等工艺制备碳纤维坩埚坯体。碳纤维具有高强度,有效保证了产品的性能。通过两步树脂增密碳化工艺,形成具有一定密度的碳碳材料。采用环氧树脂等低残碳率树脂作为一次增密碳源前驱体,环氧树脂残碳率低,可打开产品孔隙,在增密中同时打开孔隙,利于二次增密。采用酚醛树脂或呋喃树脂等高残碳率树脂为二次增密碳源前驱体,酚醛树脂残碳率高,可有效填充产品孔隙,得到具有一定密度的碳陶坩埚坯体。同时采用陶瓷烧结工艺,使氮化硼进入碳陶坩埚坯体内部,形成碳陶坩埚,氮化硼与硅不发生反应,可有效防止硅蒸汽对碳陶坩埚的侵蚀,延长了产品使用寿命。
Carbon ceramic crucible and preparation process
一种碳陶坩埚及制备工艺
KONG LINGHUA (Autor:in) / CHEN KAI (Autor:in) / ZHENG HONGWEI (Autor:in) / JIANG MENGNAN (Autor:in)
02.07.2024
Patent
Elektronische Ressource
Chinesisch
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