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Yttrium oxide partially-stabilized zirconia ceramic target material as well as preparation method and application thereof
The invention provides an yttrium oxide partially-stabilized zirconia ceramic target material as well as a preparation method and application thereof, and relates to the technical field of thermal barrier coating preparation. According to the method, the two kinds of ceramic powder with different particle sizes are mixed and then subjected to cold isostatic pressing, and after first sintering and second sintering, the powder with the small particle size is clamped between the powder with the large particle size, so that the binding force of the powder is increased, closed pores in the target material are greatly reduced, and the stability during EB-PVD production is improved. Results of the embodiment show that the prepared ceramic target material is stable in work and free of splashing when being used for EB-PVD, the cracking phenomenon is avoided, and the coating performance is greatly improved.
本发明提供了一种氧化钇部分稳定氧化锆陶瓷靶材及其制备方法和应用,涉及热障涂层制备技术领域。本发明将两种不同粒径的陶瓷粉体进行混合,然后冷等静压压制,经第一烧结和第二烧结后,使得小粒径粉体夹于大粒径粉体中间,既增加了粉体的结合力,也使得靶材内闭气孔大大降低,提高了EB‑PVD生产时的稳定性。实施例的结果表明,本发明制备的陶瓷靶材在用于EB‑PVD时工作稳定,无喷溅,且不会出现开裂现象,使得涂层性能大大提高。
Yttrium oxide partially-stabilized zirconia ceramic target material as well as preparation method and application thereof
The invention provides an yttrium oxide partially-stabilized zirconia ceramic target material as well as a preparation method and application thereof, and relates to the technical field of thermal barrier coating preparation. According to the method, the two kinds of ceramic powder with different particle sizes are mixed and then subjected to cold isostatic pressing, and after first sintering and second sintering, the powder with the small particle size is clamped between the powder with the large particle size, so that the binding force of the powder is increased, closed pores in the target material are greatly reduced, and the stability during EB-PVD production is improved. Results of the embodiment show that the prepared ceramic target material is stable in work and free of splashing when being used for EB-PVD, the cracking phenomenon is avoided, and the coating performance is greatly improved.
本发明提供了一种氧化钇部分稳定氧化锆陶瓷靶材及其制备方法和应用,涉及热障涂层制备技术领域。本发明将两种不同粒径的陶瓷粉体进行混合,然后冷等静压压制,经第一烧结和第二烧结后,使得小粒径粉体夹于大粒径粉体中间,既增加了粉体的结合力,也使得靶材内闭气孔大大降低,提高了EB‑PVD生产时的稳定性。实施例的结果表明,本发明制备的陶瓷靶材在用于EB‑PVD时工作稳定,无喷溅,且不会出现开裂现象,使得涂层性能大大提高。
Yttrium oxide partially-stabilized zirconia ceramic target material as well as preparation method and application thereof
一种氧化钇部分稳定氧化锆陶瓷靶材及其制备方法和应用
LIU YUAN (Autor:in) / LIU WEIBO (Autor:in) / ZHANG HENG (Autor:in) / PEI YANLING (Autor:in) / GONG SHENGKAI (Autor:in)
23.07.2024
Patent
Elektronische Ressource
Chinesisch
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