Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of solid silicon carbide hollow ejector pin
The invention relates to the technical field of silicon carbide hollow ejector pin preparation, and discloses a solid silicon carbide hollow ejector pin preparation method, which comprises the following steps: designing a corresponding graphite mold according to the structure information of a solid silicon carbide hollow ejector pin to be prepared; a pyrolytic carbon coating and a silicon carbide coating are sequentially prepared on a graphite mold in a covering mode through a chemical vapor deposition method, then the graphite mold and the pyrolytic carbon coating are removed through an oxidation etching method, the independently existing silicon carbide coating is obtained, and the independently existing silicon carbide coating is the solid silicon carbide hollow ejector pin to be prepared. The graphite mold can guarantee the inner hole forming problem of the solid silicon carbide hollow ejector pin, meanwhile, the pyrolytic carbon coating can avoid permeation of graphite and silicon carbide, the cleanliness of the inner hole of the ejector pin is guaranteed, the yield of the ejector pin is increased, and the problem that the cleanliness of the solid silicon carbide hollow ejector pin prepared in the prior art is insufficient is solved.
本发明涉及碳化硅空心顶针制备的技术领域，公开了一种实体碳化硅空心顶针制备方法，本发明通过根据待制备的实体碳化硅空心顶针的结构信息设计对应的石墨模具，通过化学气相沉积法依次在石墨模具上覆盖式制备热解碳涂层与碳化硅涂层，之后通过氧化刻蚀法去除石墨模具和热解碳涂层，得到独立存在的碳化硅涂层，独立存在的碳化硅涂层即为待制备的实体碳化硅空心顶针，石墨模具能够确保实体碳化硅空心顶针的内孔成型的问题，同时热解碳涂层能够避免石墨与碳化硅的渗透，保证了顶针内孔洁净度，提升了顶针良品率，解决了现有技术中制备实体碳化硅空心顶针洁净度不足的问题。
Preparation method of solid silicon carbide hollow ejector pin
The invention relates to the technical field of silicon carbide hollow ejector pin preparation, and discloses a solid silicon carbide hollow ejector pin preparation method, which comprises the following steps: designing a corresponding graphite mold according to the structure information of a solid silicon carbide hollow ejector pin to be prepared; a pyrolytic carbon coating and a silicon carbide coating are sequentially prepared on a graphite mold in a covering mode through a chemical vapor deposition method, then the graphite mold and the pyrolytic carbon coating are removed through an oxidation etching method, the independently existing silicon carbide coating is obtained, and the independently existing silicon carbide coating is the solid silicon carbide hollow ejector pin to be prepared. The graphite mold can guarantee the inner hole forming problem of the solid silicon carbide hollow ejector pin, meanwhile, the pyrolytic carbon coating can avoid permeation of graphite and silicon carbide, the cleanliness of the inner hole of the ejector pin is guaranteed, the yield of the ejector pin is increased, and the problem that the cleanliness of the solid silicon carbide hollow ejector pin prepared in the prior art is insufficient is solved.
本发明涉及碳化硅空心顶针制备的技术领域，公开了一种实体碳化硅空心顶针制备方法，本发明通过根据待制备的实体碳化硅空心顶针的结构信息设计对应的石墨模具，通过化学气相沉积法依次在石墨模具上覆盖式制备热解碳涂层与碳化硅涂层，之后通过氧化刻蚀法去除石墨模具和热解碳涂层，得到独立存在的碳化硅涂层，独立存在的碳化硅涂层即为待制备的实体碳化硅空心顶针，石墨模具能够确保实体碳化硅空心顶针的内孔成型的问题，同时热解碳涂层能够避免石墨与碳化硅的渗透，保证了顶针内孔洁净度，提升了顶针良品率，解决了现有技术中制备实体碳化硅空心顶针洁净度不足的问题。
Preparation method of solid silicon carbide hollow ejector pin
实体碳化硅空心顶针制备方法
HUANG CHUNLI (Autor:in) / ZHU BAIXI (Autor:in) / LIU GANG (Autor:in) / JI JIAWEI (Autor:in)
11.10.2024
Patent
Elektronische Ressource
Chinesisch
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