Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Sintering method of yellow tungsten titanium oxide target material and yellow tungsten titanium oxide target material
The invention belongs to the technical field of target material preparation, and discloses a sintering method of a yellow tungsten titanium oxide target material and the yellow tungsten titanium oxide target material, the sintering method of the yellow tungsten titanium oxide target material comprises the following steps: step 1, heating a tungsten titanium oxide target blank to 800 DEG C at a heating rate of 0.5-1 DEG C/min, continuously introducing oxygen in the process, and controlling the oxygen flow to be 15-20 L/min; and 2, the temperature is increased to 1150-1200 DEG C from 800 DEG C at the temperature increasing rate of 2-3 DEG C/min, heat preservation is conducted for 1-3 h, oxygen is continuously introduced in the process, and the oxygen flow is 40-60 L/min. The invention discloses a sintering method of a yellow tungsten titanium oxide target material, which adopts a two-stage heating mode, and the density of the target material is improved through a lower heating rate and a lower oxygen flow rate in the first heating stage; in the second heating stage, a high heating rate and a high oxygen flow rate are adopted to avoid the situation that tungsten trioxide is inactivated, and consequently the price of tungsten changes.
本发明属于靶材制备技术领域，公开了一种黄色氧化钨钛靶材的烧结方法及黄色氧化钨钛靶材，该黄色氧化钨钛靶材的烧结方法，包括如下步骤：步骤1：将氧化钨钛靶坯以0.5‑1℃/min的升温速率升温至800℃，过程中持续通氧，氧气流量为15‑20L/min；步骤2：以2‑3℃/min的升温速率由800℃升温至1150℃‑1200℃，保温1‑3h，过程中持续通氧，氧气流量为40‑60L/min。本发明公开了一种黄色氧化钨钛靶材的烧结方法，采用两段升温的方式，在第一段升温阶段通过较低的升温速率和较低氧气流量来提高靶材的致密度；在第二升温阶段，采取较高的升温速率和较高的氧气流量来避免三氧化钨失活导致钨的价位发生变化。
Sintering method of yellow tungsten titanium oxide target material and yellow tungsten titanium oxide target material
The invention belongs to the technical field of target material preparation, and discloses a sintering method of a yellow tungsten titanium oxide target material and the yellow tungsten titanium oxide target material, the sintering method of the yellow tungsten titanium oxide target material comprises the following steps: step 1, heating a tungsten titanium oxide target blank to 800 DEG C at a heating rate of 0.5-1 DEG C/min, continuously introducing oxygen in the process, and controlling the oxygen flow to be 15-20 L/min; and 2, the temperature is increased to 1150-1200 DEG C from 800 DEG C at the temperature increasing rate of 2-3 DEG C/min, heat preservation is conducted for 1-3 h, oxygen is continuously introduced in the process, and the oxygen flow is 40-60 L/min. The invention discloses a sintering method of a yellow tungsten titanium oxide target material, which adopts a two-stage heating mode, and the density of the target material is improved through a lower heating rate and a lower oxygen flow rate in the first heating stage; in the second heating stage, a high heating rate and a high oxygen flow rate are adopted to avoid the situation that tungsten trioxide is inactivated, and consequently the price of tungsten changes.
本发明属于靶材制备技术领域，公开了一种黄色氧化钨钛靶材的烧结方法及黄色氧化钨钛靶材，该黄色氧化钨钛靶材的烧结方法，包括如下步骤：步骤1：将氧化钨钛靶坯以0.5‑1℃/min的升温速率升温至800℃，过程中持续通氧，氧气流量为15‑20L/min；步骤2：以2‑3℃/min的升温速率由800℃升温至1150℃‑1200℃，保温1‑3h，过程中持续通氧，氧气流量为40‑60L/min。本发明公开了一种黄色氧化钨钛靶材的烧结方法，采用两段升温的方式，在第一段升温阶段通过较低的升温速率和较低氧气流量来提高靶材的致密度；在第二升温阶段，采取较高的升温速率和较高的氧气流量来避免三氧化钨失活导致钨的价位发生变化。
Sintering method of yellow tungsten titanium oxide target material and yellow tungsten titanium oxide target material
一种黄色氧化钨钛靶材的烧结方法及黄色氧化钨钛靶材
LUO SISHI (Autor:in) / LI KAIJIE (Autor:in) / WANG QIFENG (Autor:in) / GU DESHENG (Autor:in) / ZHANG XINGYU (Autor:in)
15.10.2024
Patent
Elektronische Ressource
Chinesisch
Hot pressed sintering preparation method of tungsten oxide-based ceramic target material
| Europäisches Patentamt | 2021
Preparation method of indium tungsten oxide target material
| Europäisches Patentamt | 2022
Tungsten indium oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
Hot isostatic pressing sintering preparation method of tungsten oxide-based ceramic target material
| Europäisches Patentamt | 2021