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AlN ceramic substrate and preparation method and application thereof
The invention provides an AlN ceramic substrate and a preparation method and application thereof, and the preparation method comprises the steps: mixing a plasticizer, a binder and an organic solvent, and heating and stirring to obtain a mixed solvent; performing first-stage powder mixing on the mixed dispersing agent, the sintering aid and part of the mixed solvent to obtain a first mixed material; mixing AlN powder and the first mixed material for second-stage powder mixing to obtain a second mixed material; mixing the residual mixed solvent and the second mixed material, and performing ball milling to obtain AlN slurry; sequentially carrying out vacuum defoaming, tape casting and drying on the AlN slurry to obtain an AlN biscuit; sequentially slitting and degreasing the AlN biscuit to obtain an AlN green body; and sintering the AlN green body to obtain the AlN ceramic substrate. According to the preparation method provided by the invention, the thick ceramic green body can be obtained without intermediate processes such as lamination and warm isostatic pressing, so that the process flow is simplified, the additional cost is reduced, the production efficiency is improved, and large-scale popularization and application are facilitated.
本发明提供了一种AlN陶瓷基板及其制备方法与应用,所述制备方法包括:混合增塑剂、粘结剂和有机溶剂进行加热搅拌,得到混合溶剂;混合分散剂、烧结助剂和部分混合溶剂进行第一阶段混粉,得到第一混料;混合AlN粉末和第一混料进行第二阶段混粉,得到第二混料;混合剩余混合溶剂和第二混料进行球磨,得到AlN浆料;将AlN浆料依次进行真空除泡、流延成型与干燥,得到AlN素坯;将AlN素坯依次进行分切与脱脂,得到AlN生坯;将AlN生坯进行烧结处理,得到AlN陶瓷基板。本发明提供的制备方法无需经过叠层、温等静压等中间工艺得到厚的陶瓷生坯,简化了工艺流程,降低了附加成本,提高了生产效率,有利于大规模推广应用。
AlN ceramic substrate and preparation method and application thereof
The invention provides an AlN ceramic substrate and a preparation method and application thereof, and the preparation method comprises the steps: mixing a plasticizer, a binder and an organic solvent, and heating and stirring to obtain a mixed solvent; performing first-stage powder mixing on the mixed dispersing agent, the sintering aid and part of the mixed solvent to obtain a first mixed material; mixing AlN powder and the first mixed material for second-stage powder mixing to obtain a second mixed material; mixing the residual mixed solvent and the second mixed material, and performing ball milling to obtain AlN slurry; sequentially carrying out vacuum defoaming, tape casting and drying on the AlN slurry to obtain an AlN biscuit; sequentially slitting and degreasing the AlN biscuit to obtain an AlN green body; and sintering the AlN green body to obtain the AlN ceramic substrate. According to the preparation method provided by the invention, the thick ceramic green body can be obtained without intermediate processes such as lamination and warm isostatic pressing, so that the process flow is simplified, the additional cost is reduced, the production efficiency is improved, and large-scale popularization and application are facilitated.
本发明提供了一种AlN陶瓷基板及其制备方法与应用,所述制备方法包括:混合增塑剂、粘结剂和有机溶剂进行加热搅拌,得到混合溶剂;混合分散剂、烧结助剂和部分混合溶剂进行第一阶段混粉,得到第一混料;混合AlN粉末和第一混料进行第二阶段混粉,得到第二混料;混合剩余混合溶剂和第二混料进行球磨,得到AlN浆料;将AlN浆料依次进行真空除泡、流延成型与干燥,得到AlN素坯;将AlN素坯依次进行分切与脱脂,得到AlN生坯;将AlN生坯进行烧结处理,得到AlN陶瓷基板。本发明提供的制备方法无需经过叠层、温等静压等中间工艺得到厚的陶瓷生坯,简化了工艺流程,降低了附加成本,提高了生产效率,有利于大规模推广应用。
AlN ceramic substrate and preparation method and application thereof
一种AlN陶瓷基板及其制备方法与应用
YAO LIJUN (Autor:in) / PAN JIE (Autor:in) / TENG XIAOPENG (Autor:in) / LIAO PEIJUN (Autor:in) / WU DONGQING (Autor:in) / YANG SAISAI (Autor:in)
15.10.2024
Patent
Elektronische Ressource
Chinesisch
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