Silicon nitride powder and method for producing silicon nitride sintered body: Fid-Bau Portal

Silicon nitride powder and method for producing silicon nitride sintered body

OHMARU TAKUJI / SHIBATA KOJI / FUJII TAKAYUKI / YAMADA TETSUO

Provided is a crystalline silicon nitride powder with which it is possible to obtain a silicon nitride-based sintered body having easy sinterability and excellent sintered body characteristics such as high-temperature strength. Also provided is a crystalline silicon nitride powder with which it is possible to produce a silicon nitride-based sintered body having sufficient mechanical strength and excellent thermal conductivity. Also provided is a method for producing a silicon nitride sintered body having both high bending strength and excellent thermal conductivity. A crystalline silicon nitride powder characterized by having a specific surface area (SA) as determined by the BET method of 3-16 m2/g (inclusive), a surface oxygen content (FSO) as determined by temperature rise morphology analysis of 0.2-0.6 mass% (inclusive), and an internal oxygen content (FIO) as determined by temperature rise morphology analysis of 0.4-1.3 mass% (inclusive), the ratio of the surface oxygen content to the BET specific surface area (FSO/SA) is 0.25 mg/m2 or more and less than 0.50 mg/m2.

本发明提供一种结晶氮化硅粉末，其能够得到具有易烧结性且高温强度等烧结体特性优异的氮化硅质烧结体。另外，本发明提供一种能够制造具有充分的机械强度、并且热传导性优异的氮化硅质烧结体的结晶氮化硅粉末。进而，本发明提供一种兼具高弯曲强度和优异的热传导性的氮化硅质烧结体的制造方法。一种结晶氮化硅粉末，其特征在于，基于BET法的比表面积(SA)为3m2/g以上且16m2/g以下，利用升温形态分析测定的表面氧量(FSO)为0.2质量％以上且0.6质量％以下，利用升温形态分析测定的内部氧量(FIO)为0.4质量％以上且1.3质量％以下，所述表面氧量相对于BET比表面积的比(FSO/SA)为0.25mg/m2以上且小于0.50mg/m2。

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