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SILICON NITRIDE POWDER AND METHOD FOR PRODUCING SILICON NITRIDE SINTERED BODY
The invention provides crystalline silicon nitride powder that can yield a silicon nitride sintered body with easy sinterability and excellent sintered body properties including high-temperature strength. It further provides crystalline silicon nitride powder that allows production of a silicon nitride sintered body having sufficient mechanical strength as well as excellent thermal conductivity. It still further provides a method for producing a silicon nitride sintered body having high flexural strength and excellent thermal conductivity. The crystalline silicon nitride powder has a specific surface area (SA) of 3 m2/g to 16 m2/g as measured by the BET method, a surface oxygen amount (FSO) of 0.2 mass% to 0.6 mass% as measured by temperature increase mode analysis, an internal oxygen amount (FIO) of 0.4 mass% to 1.3 mass% as measured by temperature increase mode analysis, a ratio (FSO/SA) of surface oxygen amount to BET specific surface area of 0.25 mg/m2 or higher and lower than 0.50 mg/m2, and a median diameter D50 in the volume-based cumulative particle size distribution measured by laser diffraction/scattering of 0.5 µm to 1.0 µm.
SILICON NITRIDE POWDER AND METHOD FOR PRODUCING SILICON NITRIDE SINTERED BODY
The invention provides crystalline silicon nitride powder that can yield a silicon nitride sintered body with easy sinterability and excellent sintered body properties including high-temperature strength. It further provides crystalline silicon nitride powder that allows production of a silicon nitride sintered body having sufficient mechanical strength as well as excellent thermal conductivity. It still further provides a method for producing a silicon nitride sintered body having high flexural strength and excellent thermal conductivity. The crystalline silicon nitride powder has a specific surface area (SA) of 3 m2/g to 16 m2/g as measured by the BET method, a surface oxygen amount (FSO) of 0.2 mass% to 0.6 mass% as measured by temperature increase mode analysis, an internal oxygen amount (FIO) of 0.4 mass% to 1.3 mass% as measured by temperature increase mode analysis, a ratio (FSO/SA) of surface oxygen amount to BET specific surface area of 0.25 mg/m2 or higher and lower than 0.50 mg/m2, and a median diameter D50 in the volume-based cumulative particle size distribution measured by laser diffraction/scattering of 0.5 µm to 1.0 µm.
SILICON NITRIDE POWDER AND METHOD FOR PRODUCING SILICON NITRIDE SINTERED BODY
SILICIUMNITRIDPULVER UND VERFAHREN ZUR HERSTELLUNG EINES SILICIUMNITRIDSINTERKÖRPERS
POUDRE DE NITRURE DE SILICIUM ET MÉTHODE POUR PRODUIRE UN CORPS FRITTÉ DE NITRURE DE SILICIUM
OHMARU TAKUJI (Autor:in) / SHIBATA KOJI (Autor:in) / FUJII TAKAYUKI (Autor:in) / YAMADA TETSUO (Autor:in)
22.01.2025
Patent
Elektronische Ressource
Englisch
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