Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Aluminum nitride ceramic for electronic packaging and preparation method thereof
The invention provides aluminum nitride ceramic for electronic packaging and a preparation method thereof, and belongs to the field of electronic packaging ceramic materials.In the sintering process of the aluminum nitride ceramic, aluminum nitride is used as a raw material, erbium hydride and yttrium oxide are added to serve as composite auxiliaries for sintering, and the aluminum nitride ceramic is prepared. The erbium hydride powder and the yttrium oxide powder account for 1wt%-5wt% of the total mass of the mixed material required for sintering, and the balance is the aluminum nitride powder. Rare earth hydride is adopted as a sintering aid, rare earth element simple substances generated by hydride decomposition can be combined with oxygen element in aluminum oxide, generated rare earth oxide can continue to react with aluminum oxide, the rare earth hydride has a dual deoxidization effect, oxygen is prevented from entering aluminum nitride crystal lattices to form defects, and the heat conductivity can be effectively improved; erbium hydride and yttrium oxide are used as composite sintering aids, so that eutectic lines for generating an aluminate liquid phase can be reduced, the liquid phase appears at a lower temperature, and the density of a sample is promoted.
本发明提出了一种电子封装用的氮化铝陶瓷及其制备方法，属于电子封装陶瓷材料领域，在氮化铝陶瓷烧结过程中以氮化铝为原料，加入氢化铒及氧化钇作为复合助剂进行烧结，所述氢化铒粉末及氧化钇粉末按照质量百分比均为烧结所需混合物料的总质量1wt％～5wt％，余量为氮化铝粉末。本发明采用稀土氢化物作为烧结助剂，氢化物分解产生的稀土元素单质可以结合氧化铝中的氧元素，产生的稀土氧化物可以继续与氧化铝反应，稀土氢化物有双重除氧作用，避免氧进入氮化铝晶格形成缺陷，可以有效提高热导率；以氢化铒及氧化钇作为复合烧结助剂可以降低生成铝酸盐液相的共晶线，使液相出现在更低的温度，促进样品的致密度。
Aluminum nitride ceramic for electronic packaging and preparation method thereof
The invention provides aluminum nitride ceramic for electronic packaging and a preparation method thereof, and belongs to the field of electronic packaging ceramic materials.In the sintering process of the aluminum nitride ceramic, aluminum nitride is used as a raw material, erbium hydride and yttrium oxide are added to serve as composite auxiliaries for sintering, and the aluminum nitride ceramic is prepared. The erbium hydride powder and the yttrium oxide powder account for 1wt%-5wt% of the total mass of the mixed material required for sintering, and the balance is the aluminum nitride powder. Rare earth hydride is adopted as a sintering aid, rare earth element simple substances generated by hydride decomposition can be combined with oxygen element in aluminum oxide, generated rare earth oxide can continue to react with aluminum oxide, the rare earth hydride has a dual deoxidization effect, oxygen is prevented from entering aluminum nitride crystal lattices to form defects, and the heat conductivity can be effectively improved; erbium hydride and yttrium oxide are used as composite sintering aids, so that eutectic lines for generating an aluminate liquid phase can be reduced, the liquid phase appears at a lower temperature, and the density of a sample is promoted.
本发明提出了一种电子封装用的氮化铝陶瓷及其制备方法，属于电子封装陶瓷材料领域，在氮化铝陶瓷烧结过程中以氮化铝为原料，加入氢化铒及氧化钇作为复合助剂进行烧结，所述氢化铒粉末及氧化钇粉末按照质量百分比均为烧结所需混合物料的总质量1wt％～5wt％，余量为氮化铝粉末。本发明采用稀土氢化物作为烧结助剂，氢化物分解产生的稀土元素单质可以结合氧化铝中的氧元素，产生的稀土氧化物可以继续与氧化铝反应，稀土氢化物有双重除氧作用，避免氧进入氮化铝晶格形成缺陷，可以有效提高热导率；以氢化铒及氧化钇作为复合烧结助剂可以降低生成铝酸盐液相的共晶线，使液相出现在更低的温度，促进样品的致密度。
Aluminum nitride ceramic for electronic packaging and preparation method thereof
一种电子封装用的氮化铝陶瓷及其制备方法
XU ZHIGANG (Autor:in) / HE KAIPING (Autor:in) / WANG CHUANBIN (Autor:in) / PENG JIAN (Autor:in) / SHEN QIANG (Autor:in) / ZHANG LIANMENG (Autor:in)
12.11.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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