Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of dust-free acid-resistant graphite boat
The invention relates to a manufacturing technology of semiconductor device production equipment, and aims to provide a preparation method of a dust-free acid-resistant graphite boat. Comprising the following steps: hydrolyzing a titanate coupling agent to obtain a modified solution, and soaking a cleaned graphite boat in the modified solution; taking out, cleaning and drying; and firing the graphite boat under the condition of maintaining vacuum or inert atmosphere to obtain the dust-free acid-resistant graphite boat. The main coating material is a titanate coupling agent, and after hydrolysis, the titanate coupling agent is tightly combined with the graphite material to form chemical crosslinking, so that dust-free protection on the surface of the material is realized; and a TiC/TiO2 coating is further formed under high-temperature deposition, so that dust-free protection on the surface of the graphite boat is realized. The method disclosed by the invention is simple to operate, low in equipment requirement and low in comprehensive cost, and the use effect of the product in actual production operation is good; the machining cost is not increased, the service life of a product can be prolonged, and the problems of boat marks and the like are solved.
本发明涉及半导体器件生产设备的制造技术，旨在提供一种无尘抗酸石墨舟的制备方法。包括：将钛酸酯类偶联剂水解得到改性溶液，将洗净后是石墨舟浸入其中浸泡；取出后清洗、烘干；在维持真空或惰性气氛的条件下对石墨舟进行灼烧处理，得到无尘抗酸石墨舟。本发明中的主要涂层材料为钛酸酯类偶联剂，发生水解后与石墨材料紧密结合形成化学交联，实现材料表面无尘保护；进一步在高温下沉积下形成TiC/TiO2涂层，实现对石墨舟表面的无尘保护。本发明的方法操作简单、设备要求低，综合成本低，产品在实际生产运行中的使用效果好；不增加机械加工成本，并可以提高产品的使用寿命和防止舟印等问题。
Preparation method of dust-free acid-resistant graphite boat
The invention relates to a manufacturing technology of semiconductor device production equipment, and aims to provide a preparation method of a dust-free acid-resistant graphite boat. Comprising the following steps: hydrolyzing a titanate coupling agent to obtain a modified solution, and soaking a cleaned graphite boat in the modified solution; taking out, cleaning and drying; and firing the graphite boat under the condition of maintaining vacuum or inert atmosphere to obtain the dust-free acid-resistant graphite boat. The main coating material is a titanate coupling agent, and after hydrolysis, the titanate coupling agent is tightly combined with the graphite material to form chemical crosslinking, so that dust-free protection on the surface of the material is realized; and a TiC/TiO2 coating is further formed under high-temperature deposition, so that dust-free protection on the surface of the graphite boat is realized. The method disclosed by the invention is simple to operate, low in equipment requirement and low in comprehensive cost, and the use effect of the product in actual production operation is good; the machining cost is not increased, the service life of a product can be prolonged, and the problems of boat marks and the like are solved.
本发明涉及半导体器件生产设备的制造技术，旨在提供一种无尘抗酸石墨舟的制备方法。包括：将钛酸酯类偶联剂水解得到改性溶液，将洗净后是石墨舟浸入其中浸泡；取出后清洗、烘干；在维持真空或惰性气氛的条件下对石墨舟进行灼烧处理，得到无尘抗酸石墨舟。本发明中的主要涂层材料为钛酸酯类偶联剂，发生水解后与石墨材料紧密结合形成化学交联，实现材料表面无尘保护；进一步在高温下沉积下形成TiC/TiO2涂层，实现对石墨舟表面的无尘保护。本发明的方法操作简单、设备要求低，综合成本低，产品在实际生产运行中的使用效果好；不增加机械加工成本，并可以提高产品的使用寿命和防止舟印等问题。
Preparation method of dust-free acid-resistant graphite boat
一种无尘抗酸石墨舟的制备方法
ZHOU ZHIQIANG (Autor:in) / HOU HUILEI (Autor:in) / BAO XIANJUN (Autor:in) / LI ZHIHENG (Autor:in) / LI WENQIANG (Autor:in)
13.12.2024
Patent
Elektronische Ressource
Chinesisch
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