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Method for oxidizing DCB aluminum nitride ceramic chip
The invention relates to the technical field of semiconductor substrate preparation processes, in particular to a DCB aluminum nitride ceramic chip oxidation method. The oxidized aluminum nitride ceramic chip is prepared by sequentially carrying out ultrasonic water washing, activating treatment, drying treatment, oxidation treatment and ultrasonic water washing on the aluminum nitride ceramic chip. The processing method is simple to operate, low in energy consumption and short in period, and has a good application prospect in the technical field of semiconductor substrate preparation processes.
本发明涉及半导体基板制备工艺技术领域，具体是一种DCB氮化铝瓷片氧化方法。本发明通过对氮化铝瓷片依次进行超声水洗、活化处理、烘干处理、氧化处理、超声水洗，制备得到经氧化后的氮化铝瓷片。该处理方法操作简单，能耗低，周期短，在半导体基板制备工艺技术领域具有良好的应用前景。
Method for oxidizing DCB aluminum nitride ceramic chip
The invention relates to the technical field of semiconductor substrate preparation processes, in particular to a DCB aluminum nitride ceramic chip oxidation method. The oxidized aluminum nitride ceramic chip is prepared by sequentially carrying out ultrasonic water washing, activating treatment, drying treatment, oxidation treatment and ultrasonic water washing on the aluminum nitride ceramic chip. The processing method is simple to operate, low in energy consumption and short in period, and has a good application prospect in the technical field of semiconductor substrate preparation processes.
本发明涉及半导体基板制备工艺技术领域，具体是一种DCB氮化铝瓷片氧化方法。本发明通过对氮化铝瓷片依次进行超声水洗、活化处理、烘干处理、氧化处理、超声水洗，制备得到经氧化后的氮化铝瓷片。该处理方法操作简单，能耗低，周期短，在半导体基板制备工艺技术领域具有良好的应用前景。
Method for oxidizing DCB aluminum nitride ceramic chip
一种DCB氮化铝瓷片氧化方法
LI YAN (Autor:in) / CAI JUN (Autor:in) / CAO HAIYANG (Autor:in) / WANG ZICHENG (Autor:in) / SUN TIAN (Autor:in) / ZHANG JIN (Autor:in)
31.12.2024
Patent
Elektronische Ressource
Chinesisch
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