Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Composition for ferroelectric thin film formation, method for forming ferroelectric thin film, and ferroelectric thin film formed by the method thereof
Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (Pb x La y )(Zr z Ti (1-z) )O 3 [wherein 0.9 < x < 1.3, 0 ¤y < 0.1, and 0 ¤z < 0.9 are satisfied] with a composite oxide (B). The composite oxide (B) includes one or more elements selected from the group consisting of Si and Bi.
Composition for ferroelectric thin film formation, method for forming ferroelectric thin film, and ferroelectric thin film formed by the method thereof
Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (Pb x La y )(Zr z Ti (1-z) )O 3 [wherein 0.9 < x < 1.3, 0 ¤y < 0.1, and 0 ¤z < 0.9 are satisfied] with a composite oxide (B). The composite oxide (B) includes one or more elements selected from the group consisting of Si and Bi.
Composition for ferroelectric thin film formation, method for forming ferroelectric thin film, and ferroelectric thin film formed by the method thereof
Zusammensetzung zur Bildung von ferroelektrischen Dünnfilmen, Verfahren zur Bildung von ferroelektrischen Dünnfilmen und mit diesem Verfahren gebildete ferroelektrische Dünnschicht
Composition pour la formation d'un film mince ferroélectrique, procédé de formation d'un film mince ferroélectrique et film ferroélectrique formé selon ce procédé
FUJII JUN (Autor:in) / SAKURAI HIDEAKI (Autor:in) / NOGUCHI TAKASHI (Autor:in) / SOYAMA NOBUYUKI (Autor:in)
21.02.2018
Patent
Elektronische Ressource
Englisch
| Europäisches Patentamt | 2016
| Europäisches Patentamt | 2017
Europäisches Patentamt | 2015
Composition for ferroelectric thin film formation and method for forming ferroelectric thin film
| Europäisches Patentamt | 2016