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MANUFACTURING METHOD OF MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MANUFACTURING METHOD OF ALUMINUM NITRIDE CRYSTALS, AND DOWNFALL DEFECT PREVENTION METHOD
The purpose of the present is to provide a modified AlN source for suppressing downfall defects. This manufacturing method of a modified aluminum nitride source involves a heat treatment step for heat treating an aluminum nitride source and generating an aluminum nitride sintered body.
MANUFACTURING METHOD OF MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MANUFACTURING METHOD OF ALUMINUM NITRIDE CRYSTALS, AND DOWNFALL DEFECT PREVENTION METHOD
The purpose of the present is to provide a modified AlN source for suppressing downfall defects. This manufacturing method of a modified aluminum nitride source involves a heat treatment step for heat treating an aluminum nitride source and generating an aluminum nitride sintered body.
MANUFACTURING METHOD OF MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MANUFACTURING METHOD OF ALUMINUM NITRIDE CRYSTALS, AND DOWNFALL DEFECT PREVENTION METHOD
HERSTELLUNGSVERFAHREN FÜR MODIFIZIERTES ALUMINIUMNITRIDROHMATERIAL, MODIFIZIERTES ALUMINIUMNITRIDROHMATERIAL, HERSTELLUNGSVERFAHREN FÜR ALUMINIUMNITRIDKRISTALLE UND FALLFEHLERVERHINDERUNGSVERFAHREN
PROCÉDÉ DE FABRICATION DE MATIÈRE PREMIÈRE DE NITRURE D'ALUMINIUM MODIFIÉ, MATIÈRE PREMIÈRE DE NITRURE D'ALUMINIUM MODIFIÉ, PROCÉDÉ DE FABRICATION DE CRISTAUX DE NITRURE D'ALUMINIUM ET PROCÉDÉ DE PRÉVENTION DE DÉFAUT D'AFFAISSEMENT
KANEKO TADAAKI (Autor:in) / DOJIMA DAICHI (Autor:in) / MATSUBARA MOEKO (Autor:in) / NISHIO YOSHITAKA (Autor:in)
22.05.2024
Patent
Elektronische Ressource
Englisch
Modified aluminum nitride, application thereof and aluminum nitride modification method
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