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VACUUM WAFER CHUCK WITH SOLID DIAMOND PINS
A vacuum wafer chuck with solid diamond pins. The VCSEL device may comprise a plurality of layers forming a protective diode outside of the lithographic aperture area, wherein the surface area of the protective diode is larger than the surface area of said lithographic aperture.
VACUUM WAFER CHUCK WITH SOLID DIAMOND PINS
A vacuum wafer chuck with solid diamond pins. The VCSEL device may comprise a plurality of layers forming a protective diode outside of the lithographic aperture area, wherein the surface area of the protective diode is larger than the surface area of said lithographic aperture.
VACUUM WAFER CHUCK WITH SOLID DIAMOND PINS
VAKUUM-WAFER-SPANNFUTTER MIT FESTEN DIAMANTSTIFTEN
MANDRIN DE TRANCHE SOUS VIDE AVEC BROCHES EN DIAMANT MASSIF
COPPOLA JONATHAN (Autor:in) / COOMBS NICHOLAS (Autor:in) / WANG JIWEN (Autor:in) / AGHAJANIAN MIKE (Autor:in)
05.03.2025
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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